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long-range atomic force microscope
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Select article: Dimensional metrology in the macroscopic range with sub-nanometre resolution
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Research article
First published May, 2013
Dimensional metrology in the macroscopic range with sub-nanometre resolution
Tino Hausotte,
Nataliya Vorbringer-Dorozhovets,
Jing C Shen
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Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture
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Select article: Selective layer chemical mechanical planarization process mimicked with atomic force microscope
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Research article
First published May, 2011
Selective layer chemical mechanical planarization process mimicked with atomic force microscope
F Ilie,
C Tita
Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology
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