This study was aimed to explore the high-temperature oxidation behaviour of AlTiSiN and AlCrSiN coatings. The coatings were deposited using arc ion plating and annealed in air at a temperature range of 600–1000°C for 2 h. The results showed that the oxidation of AlTiSiN coatings started at 900°C and failed at 1000°C. However, the oxidation of AlCrSiN was different from AlTiSiN coatings, which commenced at 800°C and kept stable till 1000°C. The hardness of the as-deposited AlTiSiN coatings dropped from 25.2 to 16.5 GPa after 1000°C annealing, while AlCrSiN coatings decreased from 24.2 to 20.5 GPa. The AlCrSiN coating exhibits a better high-temperature oxidation resistance than AlTiSiN coating.
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