Abstract
Abstract
Soft robots should move in an unstructured environment and explore it and, to do so, they should be able to measure and distinguish proprioceptive and exteroceptive stimuli. This can be done by embedding mechanosensing systems in the body of the robot. Here, we present a polydimethylsiloxane block sensorized with an electro-optical system and a resistive strain gauge made with the supersonic cluster beam implantation (SCBI) technique. We show how to integrate these sensing elements during the whole fabrication process of the soft body and we demonstrate that their presence does not change the mechanical properties of the bulk material. Exploiting the position of both sensing systems and a proper combination of the output signals, we present a strategy to measure simultaneously external pressure and positive/negative bending of the body. In particular, the optical system can reveal any mechanical stimulation (external from the soft block or due to its own deformation), while the resistive strain gauge is insensitive to the external pressure, but sensitive to the bending of the body. This solution, here applied to a simple block of soft material, could be extended to the whole body of a soft robot. This approach provides detection and discrimination of the two stimuli (pressure and bending), with low computational effort and without significant mechanical constraint.
Introduction
I
Materials used for building soft robots are mainly stretchable elastomers, such as platinum catalyzed silicones (i.e., polydimethylsiloxane [PDMS] or Ecoflex® series). While elastic for small deformations, these materials exhibit a highly nonlinear behavior for large strains. 12 At the same time, their mechanical characteristics are useful to attempt mimicking natural skin and underlying tissues and they are a good choice for the fabrication of bioinspired robots. To our knowledge, only Shepherd's group has uniquely embedded proprioception and exteroception in a soft robot inspired by the octopus, 14 by way of a highly stretchable skin. Owing to the capacitive and electroluminescent sensing functions of the skin, it was demonstrated that the robot can either sense the skin stretching, due to its own movement, or that it can detect a pressure coming from the outside.
In the last decade, soft mechanical sensing solutions have shown a strong boost.15–19 This has mainly been pushed by the exploitation of novel materials (e.g., graphene, metallic nanowires, and functional organic compounds) and to the rapid development of fabrication techniques at the micro/nanoscale. In particular, highly deformable materials (both conductive and nonconductive) were used to mimic the basic characteristics of skin-like flexibility or elasticity. For instance, strain or bending sensors, based on silver nanowires,20,21 graphene,22–24 or carbon nanotubes (CNT),25,26 have been embedded in ultrathin polymeric films. Also, sensors based on gold nanowires, 27 organic transistors,28–30 and conductive textiles have been proposed.31–33 In addition to single sensors, electronic skins (e-skin) have shown remarkable advancements, especially in the field of ultrathin and ultraconformable systems.14,34–40
However, in soft robots and wearable systems,41–46 it becomes crucial using such deformable devices to encode a variety of mechanical inputs. In doing so, several aspects are still overlooked, owing to testing single specific functionalities of the devices or to implementing them per se. One key issue is the capability of detecting and distinguishing different types of mechanical cues either external or originated by the movement of the artifacts (e.g., pressure, strain, or bending), which we name mechanical multimodality.
One possible strategy should be the integration of separate transducers, each sensing one different mechanical stimulus. Nevertheless, in general, soft tactile sensing devices respond in a very similar way under different solicitations. This is mainly due to their basic building blocks made of soft materials that exhibit a very similar response (e.g., mostly electrical, such as change in resistance, capacitance, or current) to deformations induced in the device by any type of outer mechanical stimuli (e.g., indentation and traction). Most of the multimodal mechanical sensors found in the literature suffer from such limitation.47–49 Another possible strategy is the integration of many similar sensors, each transducing the same mechanical solicitation and elaborating the collected sensor signals with specifically developed algorithms to discriminate between different stimulations.
Following this approach, in a previous work, we addressed the discrimination of two different types of mechanical stimuli in a soft body. 50 We used two similar sensing elements (based on e-textiles and elastomers embedded in the soft module) to recognize the convex from the concave side and detect the bending angle (or maximum deflection), and to distinguish between bending (i.e., local strain) and external force solicitation. However, when this solution is distributed along the body of the whole robot, it can be limited by the high number of connections, which would affect the mechanical behavior of the system, and by the electronic and computational complexities. For example, in Cianchetti et al., 51 resistive stretch sensors are exploited to reconstruct the spatial configuration of a continuum soft arm. In this case, the local curvature of the arm is retrieved with differential strain measurements, and the reconstruction method allows obtaining the spatial configuration from local deformations. Yet, the bottleneck for real applications is the wiring needed for measuring each resistance variation. Another example is given by Chossat et al., 52 who developed a soft tactile skin using an embedded ionic liquid matrix. Here, a tomographic imaging process is needed for reconstructing the stimulation map, and for larger matrices, real-time elaboration is computationally very demanding.
Indeed, another and very promising strategy is to combine material structuring at the micro/nanoscale with nanocomposites, such as graphene, nanowires, or CNT. For instance, following this approach a multilayer device, made of a porous rubber and an air gap between two PDMS/CNT conductive thin films, was developed to distinguish between pressure and lateral strain. 53 Similarly, a device based on nylon and polyurethane fibers, functionalized with silver nanowires and coated with piezoresistive rubber, 54 has the capability to discriminate pressure, strain, and flexion.
Nevertheless, even with remarkable sensing capabilities such as the abovementioned example, the current devices are optimized as single components, without considering the direct integration in a soft body. Also, they are tested on rigid supports of the experimental setups. This represents another key issue that must be tackled for sensorizing soft robots (i.e., where the substrate is the robot body made of soft elastomers such as PDMS or Ecoflex) and wearable systems (i.e., where the substrate is the human body).
Proposed solution
In this article, we present a new solution for soft mechanosensing that has three key aspects. The first is that it can retrieve both exteroceptive (pressure) and proprioceptive (strain due to bending) information; the second is that the two transduction principles (i.e., electro-optical and resistive) are exploited in a soft body; finally, the third is that the sensing technologies used do not alter the original mechanical characteristics of the starting soft material (i.e., PDMS) intended to constitute the bulk of a future actuated structure.
More in detail, our device is made of a PDMS block (that we call body) with optical components embedded during the fabrication process. A photodiode and a phototransistor are used as transmitter and receiver, respectively, obtaining an electro-optical sensor. The use of PDMS as soft waveguide for sensing mechanical stimulations has been already reported. For instance, Ramuz et al. 55 presented a transparent, pressure-sensitive, artificial skin based on a layer of PDMS embedding organic LEDs and photodetectors, while we have previously shown how the same principle can be used to develop an extended electronic skin for distributed and multiple pressure mapping. 56 Also, very recently, a fiber-reinforced soft prosthetic hand was reported, in which PDMS-based waveguides are exploited to detect curvature, elongation, or external force. 57 All these results are encouraging and show the potential of using a soft transparent material having the twofold function of mechanical substrate and waveguide.
In this work, we use the waveguide system for sensing pressure. Moreover, one of the body surfaces embeds patterned conductive electrodes forming a resistive strain gauge, which are produced by supersonic cluster beam implantation (SCBI), an innovative technique for making conductive parts in soft elastomers. 58 The discrimination of outer pressure from bending is obtained by combining optical and resistive signals, and by using a proper architecture as discussed in the next section. In this approach, the body and the sensing elements are completely merged during the whole fabrication process. We demonstrate that all embedded sensing elements do not affect the mechanical behavior of the soft body. Finally, we show that it is possible to distinguish and to measure both sequential and simultaneous pressure/bending stimulations.
Materials and Methods
Design and strategy for revealing simultaneous multiple stimuli
PDMS is one of the most used materials in soft robotics and the device here proposed (shown in Fig. 1) can be considered as a proof-of-concept for a section of soft robot with embedded sensing capabilities. The bulk body acts as a waveguide for the light emitted by the photodiode and collected by the phototransistor. Due to the reduced dimensions of the optical elements, the bulk mechanical characteristics are not affected by their integration in the body.

Fabrication process of the device.
The conductive pattern is implanted on one of the two surfaces by SCBI. A bending of the structure induces a strain on the patterned surface, which can be measured from its resistance variation. For this reason, the resistive layer cannot be located in the middle of the structure, otherwise it would be very close to the neutral plane of the device, making the strain gauge insensitive to bending (see Supplementary Data for details; Supplementary Data are available online at www.liebertpub.com/soro). This must be considered as a design guideline for a future soft robot.
In a previous work, 58 the characterization of linear strain (i.e., resistance variation vs. elongation of metal layer) was presented, demonstrating the effectiveness of this kind of implantation for the implementation of a highly reliable and sensitive strain gauge. From this resistance variation, the positive or negative bending in a 2D plane can be revealed. Also, the resistive strain gauge is almost insensitive to a pressure applied on the nonimplanted surface, since the PDMS thickness highly limits pressure transmission. Remarkably, in contrast to other available technologies used to implant or integrate conductive paths on a soft substrate, the fabrication of conductive patterns based on a metal/polymer nanocomposite produced by SCBI ensures a complete integration of the sensing elements in the bulk, with excellent mechanical stability under deformation, while the mechanical properties of the nanocomposite (Young modulus) are substantially unchanged compared to the pristine polymer. 59
In contrast, any mechanical deformation of the body can be revealed measuring the output signal of the phototransistor, which is proportional to the incident light collected by the receiver. Then, by combining this asymmetrical behavior, the system is able to distinguish clearly an outer pressure from the positive or negative bending of the body.
This sensing strategy is quite general, since it depends weakly on the soft body shape and on the materials used. A key point is to exploit different sensing principles completely decoupled from both the transduction and the mechanical point of view. However, at the same time, the sensing elements should be completely embedded in the body without interfering on the bulk mechanical properties. Regarding the bulk material, a compromise in its elasticity is needed, since a completely rigid body will not be able to reveal an applied pressure, while a very soft one will not shield the buried strain sensor. For these reasons, we chose a basic body shape (a parallelepiped) for experimental validation, and PDMS as soft body material, which is widely used in soft robots and is transparent to infrared (IR) light. Finally, we should note that the described strategy is strictly valid for movement/stimulation in a 2D plane. However, it can be the basis for reconstructing movements and stimulations in the 3D space, by combining several sensing elements.
Device fabrication
The whole fabrication process is depicted in Figure 1. First of all, the PDMS body, with dimensions of 40 × 15 × 5 mm, is obtained by curing degassed PDMS (Dow Corning; Sylgard 184), with a prepolymer/crosslinker ratio of 10:1 by weight, for 24 h at room temperature in a rigid Plexiglas® mold. Before pouring the PDMS, an IR photodiode (VSMY1850; Vishay Semiconductors) and an IR phototransistor (TEMT7100X01; Vishay Semiconductors) are fixed into the mold, to be embedded in the PDMS block after the curing phase.
In addition, one of the body surfaces has patterned conductive electrodes, produced by an SCBI apparatus equipped with a pulsed microplasma cluster source (PMCS). PMCS consists in a ceramic body with a cavity in which a solid gold target is vaporized by a localized electrical discharge supported by a pulsed injection of an inert gas (He or Ar) at high pressure (40 bar). The metal atoms, sputtered from the target, aggregate in the source cavity to form metal clusters; the mixture of clusters and inert gas expands through a nozzle forming a supersonic beam into an expansion chamber kept at a pressure of about 10−6 mbar. Electrically neutral nanoparticles exiting the PMCS are aerodynamically accelerated in a highly collimated beam with divergence lower than 1° and with a kinetic energy of roughly 0.5 eV·atom−1. The central part of the cluster beam enters, through a skimmer, a second vacuum chamber (deposition chamber) where the beam is intercepted by the polymeric substrate. Using a stencil mask and substrate rastering in the plane perpendicular to the cluster beam (Fig. 1b), it is possible to homogenously implant gold nanoparticles into the target polymer with the required pattern.
In this way, a fully stretchable and conductive pattern is obtained on the surface, 58 as shown in Figure 1b. The amount of nanoparticles implanted is measured in terms of equivalent thickness (teq), defined as the thickness of a film made by an equivalent amount of nanoparticles deposited onto a rigid substrate. In this case, devices have been fabricated with teq = 81.5 ± 3 nm. It has been demonstrated that SCBI is an effective method for the microfabrication of stretchable conductive circuits on PDMS, 59 since it is applicable at room temperature (without any heating of the samples) and does not induce any charging or carbonization of the polymeric substrate.
As a following step, the nanoparticle paths are sealed to external wires by means of a layer of nickel graphite-filled silicone adhesive (Sol-08; Soliani EMC) cured at room temperature for 12 h. These soft contacts ensure both high conductivity and elasticity in the connecting region of the patterned surface to the external measuring circuitry (depicted in Fig. 1c). Finally, the whole surface is protected and electrically insulated with a 200-μm-thick film of soft elastomer (Ecoflex 00-30; Smooth-on, Inc.), as sketched in Figure 1d, deposited by spin coating at 500 rpm for 60 s and successively cured at room temperature for 12 h. The final device is shown in Figure 2a.

Read-out electronic system
The device is connected to an external custom-made printed circuit board (PCB), where the conditioning and the signal elaboration circuitry are embedded (see Figure 2b for the schematic electrical circuit) and the signal acquisition is performed by a PSoC3 (Programmable System on Chip CY8C3866AXI-040 from Cypress Semiconductor Corporation). Regarding the optical system, both the IR Led and the phototransistor are biased by means of variable resistors, to tune the emitting light intensity and the receiver collector voltage, respectively. Moreover, it is possible to vary the sensitivity of optical system. The phototransistor can be biased at different collector-to-emitter voltages V0, and, at lower bias voltages, the sensitivity is higher (see Supplementary Data for additional details). In this way, the system would be able to adapt its response to different scenarios, where a lower or a higher sensitivity could be useful. To improve the system performance, a differential mode signal treatment is adopted. The photodiode is biased with a pulse wave, with a duty cycle of 2% at frequency of 20 Hz. For each cycle, the output signal is given by the difference between the collector voltage with and without the emitted diode light (i.e., before and at the end of the pulse wave biasing the diode, respectively).This strategy avoids loss of information and has two main advantages. First of all, the pulse length (1 ms) allows to filter the low-frequency noise of the diode current, such as the random telegraph signal noise usually due to trapping/detrapping phenomena, which affects the emitted light and, by consequence, the system output signal. The second advantage is the possibility to implement a differential read-out strategy to cancel the environmental light variations that may cause interferences to the output signal.
Regarding the resistive strain gauge, it is connected in a voltage divider with a 10 kΩ resistor and its signal is acquired by reading its voltage drop. In the case of the bending experiments with a cantilever configuration (shown in Supplementary Data), a capacitive linear accelerometer (LIS2L02AL; STMicroelectronics, Inc.) is connected to the same PCB. The output voltages, together with the accelerometer outputs, are collected and elaborated by a 32-bit PIC (PIC32MX460F512L; Microchip Technology, Inc.) microcontroller and transmitted to a PC by means of USB communication. Finally, the whole system is controlled by a custom-made graphical user interface.
Experimental setup
For characterizing the system response to external applied pressure, the device is fixed on a rigid surface, and it is indented in the middle of the nonimplanted (upper) surface, as depicted in Figure 3a. First, a Delrin® probe with flat head (8 × 8 mm) is aligned to the center of the sensing area by means of three orthogonal manual micrometric translational stages with crossed roller bearing (M-105.10; PI); then, indentation of the loading probe in the normal direction is obtained by means of a servo-controlled micrometric translational stage (M-111.1; PI). At its opposite side, the probe is mechanically interfaced to a six-component load cell (ATI NANO 17 SI-25-0.25; Apex) capable of recording the indentation force applied to the soft sensing body (the acquisition frequency is 20 Hz). The probe is indented into the soft body at a constant velocity of 0.05 and 1 mm/s for quasistatic characterization and load/unload cycles, by gradually increasing the displacement and then the applied load.

Response to applied pressure.
To bend the device in a precise and repeatable way, it is installed on a thin metallic support by means of a Parafilm strip that ensures adhesion without affecting total flexibility. The metallic strip is clamped to a fixed mechanical support at one extremity, while the other end is clamped to a servo-controlled precision translation stage (M-126.CG1; PI) whose movement causes the bending of the metallic strip, and of the device fixed over it (see Fig. 4).

Response to negative/positive bending.
The two previous experimental setups have been combined to perform tests by stimulating the device with outer pressure and bending at the same time. In particular, the setup used for pressure characterization, composed by the load cell and the flat indenter mounted on the precision vertical stage, is positioned above the bending system described above, as sketched in Figure 5a.

Sequential stimuli detection.
Results and Discussion
The application of pressure causes a positive variation of the phototransistor output signal, while a null resistance variation of the gold nanoparticle paths is observed. The results are shown in Figure 3b, with a pressure up to 250 kPa. The optical output signal is given by the variation of the collector to emitter voltage (
In the case of bending, both optical and resistive signals vary. When the bending (i.e., positive) stretches the implanted surface, the resistance variation is positive; instead, in the case the same surface is compressed by an opposite bending (i.e., negative), the variation is negative (Fig. 4). Differently, the variation of the optical signal is always positive, since any mechanical deformation induces a decrease of the incident light on the receiver. Conventionally, positive or negative bending is caused by a positive or negative moment, respectively, while the vertical deflection has the opposite sign. For small deflections, the curved profile can be approximated with a circular arc. Given the strip length L = 70 mm and the vertical deflection h, it is possible to find the strain
where
the quasistatic characteristics of output signals versus vertical deflection h are shown in Figure 4b. The optical signal variation (blue solid curve) is positive for both positive and negative vertical deflections, while the resistance variation (red solid curve) follows Equation (2) (black dashed line), with
The multimodal capabilities of the system are tested, as shown in Figure 5, to evaluate the possible application in soft robotics. First of all, the capability of distinguishing sequential stimulations is tested, and the result is shown in Figure 5b. In phase I, the sample, starting from a flat configuration, is bent negatively, without coming in contact with the indenter placed over it. This bending causes an increase of the optical output signal (blue solid line) and a negative resistance variation (red solid line). Then, in phase II, the indenter is cyclically moved vertically upward and downward, stimulating the bent device with load/unload cycles. The applied pressure is measured by the load cell (shown in black dashed line). As expected, during this phase, the optical signal presents an additional variation, in phase with the applied pressure, while the resistance change is null. Finally, in phase III, the cyclical vertical indentation is stopped, and the sample is released from bending, recovering initial values for both output signals. Observing this behavior, the two signals can be combined in such a way to enhance only the variation due to the external pressure, eliminating the contribution due to bending. In particular, by defining
it is possible to find the optimal k value to have an almost null value for S in case of pure bending. The combined output signal, with
To further demonstrate the effectiveness of this strategy, also simultaneous mechanical stimulations are investigated. The results are shown in Figure 6. In this case, the indenter is put close to the sample surface. Then, when performing bending/unbending cycles, the sample hits the indenter (connected to the load cell) for a fraction of each cycle. In the noncontact phase, both output signals vary, as shown in Figure 6a. Instead, in the contact phase, the optical signal presents a very large variation (blue solid line), while the resistance change is almost null, being affected only by bending. The corresponding combined output signal (calculated with the same previous value for k) is shown in Figure 6b (green solid line), and it matches the pressure measured by the load cell (black dashed line). Then, also in this case, by exploiting Equation (2) and (3) it is possible to discriminate and measure bending and pressure.

Simultaneous stimuli detection.
Conclusion
In this work, we presented a multimodal mechanosensing system where the sensing elements are embedded in a soft body during its initial molding. Using the SCBI process, a strain gauge is incorporated without changing the mechanical properties of the bulk material (in this case PDMS). In particular, we demonstrate how, combining optical and the resistive outputs of two types of transducers in a proper (but very simple) way, the proposed system can detect and distinguish different stimuli, such as strain related to bending and external pressure. We believe that this technology has a high potential for building future multimodal soft robots with exteroception/proprioception. Indeed, to our knowledge, the only example of soft robot with these capabilities was presented by Larson et al. 14 In that case, a unique electroluminescent crawling soft robot was implemented with pneumatic actuation and a hyperelastic skin. It was demonstrated how either pressure or the degree of the actuation could be retrieved with the embedded capacitive sensing. We believe that a new generation of soft robots capable of discriminating between the two sensing modalities could be developed if the principles and technologies that we demonstrate in this work are used and experimented further.
The aim of this work was to demonstrate the effectiveness of a novel strategy for multimodal sensing in soft robotics. However, several aspects remain to be properly studied and analyzed. In particular, future works should focus on the following aspects:
• How the responses of both electro and optical mechanisms would change in the case of integration in an entirely soft body, or if a pneumatic actuator is embedded in a soft robot or in a gripper. • The dependence of the output signals on the characteristics of a contacting object. Indeed, in the case of indenters with different shapes, dimensions, and materials, the optical versus pressure characteristics will vary. Different shapes and dimensions will vary the contact area and, by consequence, the whole deformation of the soft waveguide. Also, a different material will modify the refraction of the IR wave inside the PDMS block. All these parameters will affect the wave intensity detected by the receiver. Then, a comprehensive work supported both by experiments and numerical calculations should quantify the influence of each of them, evaluating also the possible limitations. • Finally, here we considered movements only in a 2D plane, while soft robots will move in the 3D space. Then, this sensing strategy should be generalized to reconstruct 3D deformations and movements.
Given the promising results at component level, the presented approach can be further investigated in the near future at robotic level to evaluate its potential during the movement and exploration of a soft robot, without needing unwieldy wiring and distributed conditioning circuits that nowadays are some of the main technological limits in this field.
Footnotes
Author Disclosure Statement
No competing financial interests exist.
References
Supplementary Material
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