This paper presents a high-accurate micro-manipulator featured with monolithic compliant structure, orthogonally arranged parallel mechanism and piezoelectric (PZT) actuation. 6-SPS mechanism is employed to provide six degrees of freedom (DOF), including three linear translations and three rotations. The kinematics and stiffness of the micro-manipulator is studied first in this paper. Then, the relationship between PZT nominal displacement and the end pose is derived. Aiming at achieving trajectories with nano-scale accuracy, a two-step strategy is proposed. Finite element analysis (FEA) is conducted to verify the kinematics and stiffness model. Finally, in order to demonstrate the performance of the micro-manipulator, experiments of typical trajectories are carried out. The experimental result shows that the proposed micro-manipulator is capable of achieving trajectories with nano-scale accuracy.
OuyangPTjiptoprodjoRZhangW. Micro-motion devices technology: The state of arts review. Int J Adv Manuf Technol2008; 38: 463–478.
2.
ScireFETeagueEC. Piezodriven 50 -µm range stage with subnanometer resolution. Rev Scientific Instrument1978; 49: 1735–1740.
3.
Tanikawa T, Arai T, Ojala P, et al. Two-finger micro hand. In: Proceedings 1995 IEEE international conference on robotics and automation, 21–27 May 1995, pp.1674–1679. Nagoya: IEEE.
4.
Sharon A and Hardt D. Enhancement of robot accuracy using endpoint feedback and a macro-micro manipulator system. American control conference, 6–8 June 1984, pp.1836–1845. San Diego, CA, USA: IEEE.
5.
Sornmo O, Olofsson B, Schneider U, et al. Increasing the milling accuracy for industrial robots using a piezo-actuated high-dynamic micro manipulator. In: 2012 IEEE/ASME international conference on advanced intelligent mechatronics (AIM), 11–14 July 2012, pp.104–110. Kachsiung: IEEE.
6.
RyuJWGweonD-GMoonKS. Optimal design of a flexure hinge based XY ϕ wafer stage. Precision Eng1997; 21: 18–28.
7.
CulpepperMLAndersonG. Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism. Precision Eng2004; 28: 469–482.
8.
MerletJ-P. Parallel robots, New York: Springer, 2001.
9.
LiYXuQ. A novel design and analysis of a 2-DOF compliant parallel micromanipulator for nanomanipulation. IEEE Transact Automat Sci Eng2006; 3: 247–254.
10.
YongYKLuTF. The effect of the accuracies of flexure hinge equations on the output compliances of planar micro-motion stages. Mech Mach Theor2008; 43: 347–363.
11.
YongYKLuT-F. Kinetostatic modeling of 3-RRR compliant micro-motion stages with flexure hinges. Mech Mach Theor2009; 44: 1156–1175.
12.
Arai T, Herve J and Tanikawa T. Development of 3 DOF micro finger. Intelligent Robots and Systems’ 96, IROS 96, In: Proceedings of the 1996 IEEE/RSJ International Conference on, Osaka: IEEE, 1996, pp.981–987.
13.
XuQLiY. A novel design of a 3-PRC translational compliant parallel micromanipulator for nanomanipulation. Robotica2006; 24: 527–528.
14.
Xu Q and Li Y. Stiffness modeling for an orthogonal 3-PUU compliant parallel micromanipulator. In: Proceedings of the 2006 IEEE international conference on mechatronics and automation, 25–28 June 2006, pp.124–129. Luoyang, Henan: IEEE.
15.
OuyangP. A spatial hybrid motion compliant mechanism: Design and optimization. Mechatronics2011; 21(3): 479–489.
16.
YueYGaoFZhaoX. Relationship among input-force, payload, stiffness and displacement of a 3-DOF perpendicular parallel micro-manipulator. Mech Mach Theor2010; 45: 756–771.
17.
YueYGaoFJinZ. Modeling and experiment of a planar 3-DOF parallel micromanipulator. Robotica.1: 1–14.
18.
ZhuDCMengLJiangT. Structure synthesis of 3-RRS type spatial compliant parallel manipulator. Appl Mech Mater2011; 44: 1375–1379.
19.
Hudgens J and Tesar D. Analysis of a fully-parallel six degree-of-freedom micromanipulator. In: Advanced Robotics, 1991. ‘Robots in Unstructured Environments’, 91 ICAR., Fifth International Conference on. Pisa, Italy: IEEE, 19–22 June 1991, pp.814–820.
20.
Hudgens J and Tesar D. A fully parallel six degree-of-freedom micromanipulator: kinematic analysis and dynamic model. In: Proc 20th biennial ASME mechanisms conference, Orlando, Florida, September 1988, pp.29–37.
21.
YueYGaoFZhaoXC. Relationship among input-force, payload, stiffness, and displacement of a 6-DOF perpendicular parallel micromanipulator. J Mech Robot-Transact ASME2010; 2(1): 011007–011007.
22.
Shusheng B, Guanghua Z, Rong L, et al. Accuracy analysis of the serial-parallel micromotion manipulator. In: Systems, Man, and Cybernetics, 1997. Vol. 3, Computational Cybernetics and Simulation, 1997 IEEE International Conference on, Orlando, FL, 12–15 October 1997, pp.2258–2263.
23.
GaoPSweiSM. A six-degree-of-freedom micro-manipulator based on piezoelectric translators. Nanotechnology1999; 10: 447–452.
24.
LiangQZhangDChiZ. Six-DOF micro-manipulator based on compliant parallel mechanism with integrated force sensor. Robot Computer-Integrated Manuf2011; 27(1): 124–134.
25.
Liang Q, Zhang D, Song Q, et al. Design of a compliant XY stage with embedded force sensor for micro-scale positioning. In: Proceedings of the IEEE International Conference on Information and Automation, Harbin, China, 20–23 June 2010, pp.1494–1499. Harbin, China: IEEE.
26.
HowellLL. Compliant mechanisms, New York: John Wiley & Sons, 2001.
27.
ParosJWeisbordL. How to design flexural hinges. Machine Des1965; 25: 151–156.
28.
LobontiuNPaineJSGarciaE. Design of symmetric conic-section flexure hinges based on closed-form compliance equations. Mech Machine Theor2002; 37: 477–498.
29.
RagulskisKArutunianMKochikianA. A study of fillet type flexure hinges and their optimal design. Vibrat Eng1989; 3: 447–452.
