Dressing scheme and process parameters analysis for bonnet tool in bonnet polishing

Abstract

Bonnet polishing is widely used in final processing of optical elements, as the bonnet tool has the characteristic of fine surface adaptability and controllable pressure. For the purpose of ensuring the stability and exact controllability of polishing process, it is necessary to make precise dressing of bonnet tool. In this paper, first a dressing scheme using cup diamond wheel is proposed for bonnet tool, and then the feasibility of the dressing scheme is verified by analyzing the trajectory and the envelope of the diamond particles on the cup wheel. After that, the influences of the dressing process parameters on the dressing efficiency and trajectory distribution are defined through theoretical analysis and MATLAB simulation, and by simulation the dressing process parameters are determined. In addition, a trimmed program with variable speed ratio is proposed to homogenize the dressing tracks. Finally, an experiment was conducted to test the simulation result. This paper provides the theoretical basis for actual dressing process of the bonnet tool.

Keywords

Bonnet polishing cup diamond wheel dressing process parameter dressing track dressing scheme

Get full access to this article

View all access options for this article.

References

Walker

Brooks

King

et al.

The precessions tooling for polishing and figuring flat, spherical and aspherical surfaces. Opt Express 2003; 11: 958–964.

Walker

Beaucamp

Doubrovski

et al.

New developments in the precession process for manufacturing free-form, large-optical, and precision-mechanical surfaces. Proc SPIE 2006; 6148: 614805–614805.

Pan

Wang

Guo

et al.

Analysis of corrective characteristics of various polishing methods for mid-frequency errors. Proc IMechE, Part C: J Mechanical Engineering Science 2014; 228: 525–534.

Dunn

Walker

. Pseudo-random tool paths for CNC sub-aperture polishing and other applications. Opt Express 2008; 16: 18942–18949.

Wang

Xie

Jiang

et al.

Control strategy study of precession mechanism for bonnet polishing curved optical surface. J Chin Soc Mech Eng 2014; 35: 213–220.

Pan

Wang

et al.

Research on control optimization for bonnet polishing system. Int J Precis Eng Manuf 2014; 15: 483–488.

Beaucamp

Namba

. Super smooth finishing of diamond turned hard X-ray molding dies by combined fluid jet and bonnet polishing. CIRP Ann Manuf Technol 2013; 62: 315–318.

LuH FookesB Obeng

et al.

Quantitative analysis of physical and chemical changes in CMP polyurethane pad surfaces. Mater Char 2002; 49: 35–44.

Moy

Cecchi

Hetherington

et al.

Polyurethane pad degradation and wear due to tungsten and oxide CMP. Mater Res Soc 2001; 671: 171–176.

10.

Wang

Yang

Wang

. Highly efficient deterministic polishing using a semirigid bonnet. Opt Express 2014; 53: 095102–095102. . DOI:10.1117/1.OE.53.9.095102.

11.

Syoji

. Truing and dressing of superabrasive wheels. Mach Tools 1989; 2: 18–26.

12.

Lin

Wang

Guo

et al.

Research on the error analysis and compensation for the precision grinding of large aspheric mirror surface. Int J Adv Manuf Technol 2014; 97–101: 4324–4327.

13.

Choi

Lee

Park

et al.

Development of the process model for plunge grinding and optimization of grinding process. Proc IMechE, Part C: J Mechanical Engineering Science 2011; 225: 2628–2637.

14.

Zhu

Kang

Feng

et al.

Research on topography control of two-spindle and three-workstation wafer grinder. Proc IMechE, Part C: J Mechanical Engineering Science 2011; 225: 2232–2241.

15.

Feng

Huo

Guo

et al.

Ultra-precision grinding of asymmetric curved surfaces by line contact with cup wheel. Proc IMechE, Part C: J Mechanical Engineering Science 2013; 227: 111–119.