In the past decades, microfluidic chips have been one of the hottest research topics in the “lab-on-a-chip” field. However, it is still a challenge for design the perfect microchannels with high functional integration, complex geometry, and high production efficiency. This review paper provides a comprehensive overview of microfluidic structural models and designs, manufacturing techniques, and bonding methods. The effect of three types of microfluidic channel structure models and their configuration parameters on the fluid behaviors of microfluidics was investigated. Surface-to-volume ratio of the flow channel is a critical parameter for determining the mixing and diffusion capabilities of the microfluidic devices (MDs). Thereafter, the main manufacturing techniques for microstructures were discussed, including etching, photolithography, soft lithography, molding, mechanical micro-machining, laser beam micromachining, printing, and 3D printing. We performed a statistical analysis to discuss the relative advantages and disadvantages of these manufacturing methods. In addition, the current bonding methods for MDs were also summarized, including thermal bonding, solution adhesive bonding, dry adhesive bonding, plasma bonding, and anodic bonding. a comparison of different bonding methods was presented to provide a reference to select a suitable bonding method for the assembly of microfluidic device. Finally, the tendencies and challenges of microchannel manufacturing were discussed, and the prospects were also provided.
FigeysDPintoD. Lab-on-a-chip: a revolution in biological and medical sciences. Anal Chem2000; 72: 330A–335A.
2.
KulkarniMBAyachitNHAminabhaviTM. A short review on miniaturized biosensors for the detection of nucleic acid biomarkers. Biosensors2023; 13: 412.
3.
TiwariSKBhatSMahatoKK. Design and fabrication of low-cost microfluidic channel for biomedical application. Sci Rep2020; 10: 9215.
4.
YewMRenYKohKS, et al. A review of state-of-the-art microfluidic technologies for environmental applications: detection and remediation. Glob Chall2019; 3: 1800060.
5.
MaguireIO’KennedyRDucréeJ, et al. A review of centrifugal microfluidics in environmental monitoring. Anal Methods2018; 10: 1497–1515.
6.
MadhusudanBKNarasimhaHATejrajMA, et al. Recent advances in microfluidics-based paper analytical devices (µPADs) for biochemical sensors: from fabrication to detection techniques. Biochem Eng J2023: 1369–703X.
7.
BhaiyyaMPattnaikPKGoelS. A brief review on miniaturized electrochemiluminescence devices: from fabrication to applications. Curr Opin Electrochem2021; 30: 100800.
8.
GoelS. From waste to watts in micro-devices: review on development of membraned and membraneless microfluidic microbial fuel cell. Appl Mater Today2018; 11: 270–279.
9.
AmreenKGoelS. Review—Miniaturized and microfluidic devices for automated nanoparticle synthesis. ECS J Solid State Sci Technol2021; 10: 017002.
JungSYParkJHLeeSJ, et al. Heat transfer and flow characteristics of forced convection in PDMS microchannel heat sink. Exp Therm Fluid Sci2019; 109: 109904.
12.
HanJPSunJWangL, et al. The optimization of electrophoresis on a glass microfluidic chip and its application in Forensic Science. J Forensic Sci2017; 62: 1603–1612.
13.
ZhouZ-HLiuYZhangB. Microfluidic array liquid chromatography: a proof of principle study. Chin J Anal Chem2019; 47: 500–507.
14.
YinSLuRLiuC, et al. Composite microfluidic Petri dish-chip (MPD-chip) without protein coating for 2D cell culture. Langmuir2023; 39: 15643–15652.
15.
LiaoSHeYChuY, et al. Solvent-resistant and fully recyclable perfluoropolyether-based elastomer for microfluidic chip fabrication. J Mater Chem A2019; 7: 16249–16256.
16.
LuYShiWQinJ, et al. Fabrication and characterization of paper-based microfluidics prepared in nitrocellulose membrane by wax printing. Anal Chem2010; 82: 329–335.
17.
ZhouCBZhangYLeSW, et al. Fabrication of paper-based microfluidics by single-step wax printing for portable multianalyte bioassays. Adv Mater Res2014; 881–883: 503–508.
18.
KulkarniMBAyachitNHAminabhaviTM. Biosensors and microfluidic biosensors: from fabrication to application. Biosensors2022; 12: 543.
19.
NiculescuA-GChircovCBîrcăAC, et al. Fabrication and applications of microfluidic devices: a review. Int J Mol Sci2021; 22: 2011.
20.
SeemannRBrinkmannMPfohlT, et al. Droplet based microfluidics. Rep Prog Phys2012; 75: 016601.
21.
CostaALRGomesACunhaRL. Studies of droplets formation regime and actual flow rate of liquid-liquid flows in flow-focusing microfluidic devices. Exp Therm Fluid Sci2017; 85: 167–175.
22.
DengN-NMengZ-JXieR, et al. Simple and cheap microfluidic devices for the preparation of monodisperse emulsions. Lab Chip2011; 11: 3963–3969.
23.
HePBarthès-BieselDLeclercE. Flow of two immiscible liquids with low viscosity in Y shaped microfluidic systems: effect of geometry. Microfluid Nanofluidics2010; 9: 293–301.
24.
MariottiAGallettiCBrunazziE, et al. Mixing sensitivity to the inclination of the lateral walls in a T-mixer. Chem Eng Process Process Intensification2022; 170: 108699.
25.
BauerWAFischlechnerMAbellC, et al. Hydrophilic PDMS microchannels for high-throughput formation of oil-in-water microdroplets and water-in-oil-in-water double emulsions. Lab Chip2010; 10: 1814–1819.
26.
HossainSAnsariMAKimK-Y. Evaluation of the mixing performance of three passive micromixers. Chem Eng J2009; 150: 492–501.
27.
YingLXinhaiYZhenyuW, et al. Design and evaluation of an easily fabricated micromixer with three-dimensional periodic perturbation. Chem Eng J2011; 171: 291–300.
28.
HongWShiHHuangZ, et al. Design and simulation of a passive micromixer with gourd-shaped channel. J Nanosci Nanotechnol2019; 19: 206–212.
29.
BappaMSumit KumarMPromod KumarP, et al. Numerical study of mixing in wavy micromixers: comparison between raccoon and serpentine mixer. Chem Eng Process2018; 136: 44–61.
30.
ChenXZhaoZ. Numerical investigation on layout optimization of obstacles in a three-dimensional passive micromixer. Anal Chim Acta2017; 964: 142–149.
31.
RhoadesTKothapalliCRFodorPS. Mixing optimization in grooved serpentine microchannels. Micromachines2020; 11: 61.
32.
MondalBPatiSPatowariP. Analysis of mixing performances in microchannel with obstacles of different aspect ratios. Proc IMechE, Part E: J Process Mechanical Engineering2019; 233: 1045–1051.
33.
JiWHoTYWangJ, et al. Microfluidic design for concentration gradient generation using artificial neural network. IEEE Trans Comput Aided Des Integr Circuits Syst2020; 39: 2544–2557.
34.
HongSHYangHWangY. Inverse design of microfluidic concentration gradient generator using deep learning and physics-based component model. Microfluid Nanofluidics2020; 24: 44.
35.
ChenLGroverWHSridharanM, et al. Multi-objective design automation for microfluidic capture chips. IEEE Trans Nanobioscience2023; 22: 467–479.
36.
ScottSMAliZ. Fabrication methods for microfluidic devices: an overview. Micromachines2021; 12: 319.
37.
IliescuCTayFEHMiaoJ. Strategies in deep wet etching of Pyrex glass. Sens Actuators2007; 133: 395–400.
38.
IliescuC. Wet etching of glass for MEMS applications. Rom J Inf Sci Tech2006; 9: 285–310.
39.
ZhuHHollMRayT, et al. Characterization of deep wet etching of fused silica glass for single cell and optical sensor deposition. J Micromech Microeng2009; 19: 065013.
40.
WolfSMTauberRN. Silicon Processing for the VLSI Era. Britain: ELattice Press, 1986.
41.
PimpinASrituravanichW. Review on Micro- and nanolithography techniques and their applications. Eng J2012; 16: 37–56.
42.
BartlettNWWoodRJ. Comparative analysis of fabrication methods for achieving rounded microchannels in PDMS. J Micromech Microeng2016; 26: 115013.
43.
HeRYunusDUhlC, et al. Fabrication of circular microfluidic channels through grayscale dual-projection lithography. Microfluid Nanofluidics2017; 21: 13.
44.
WangLKodziusRYiX, et al. Prototyping chips in minutes: direct laser plotting (DLP) of functional microfluidic structures. Sens Actuators B2012; 168: 214–222.
45.
TrantidouTFriddinMSGanKB, et al. Mask-free laser lithography for rapid and Low-Cost microfluidic device fabrication. Anal Chem2018; 90: 13915–13921.
46.
RahulRPrasadNAjithRR, et al. A mould-free soft-lithography approach for rapid, low-cost and bulk fabrication of microfluidic chips using photopolymer sheets. Microfluid Nanofluidics2023; 27: 78.
47.
GuoJLiuKWangZ, et al. Magnetic field-assisted finishing of a mold insert with curved microstructures for injection molding of microfluidic chips. Tribol Int2017; 114: 306–314.
48.
TovarMWeberTHengojuS, et al. 3D-glass molds for facile production of complex droplet microfluidic chips. Biomicrofluidics2018; 12: 024115.
49.
JuangYLeeLJKoellingKW. Hot embossing in microfabrication. Part I: Experimental. Polym Eng Sci2002; 42: 539–550.
50.
Marcinkevi IusAJuodkazisSWatanabeM, et al. Femtosecond laser-assisted three-dimensional microfabrication in silica. Opt Lett2001; 26: 277–279.
51.
YenMHChengJYWeiCW, et al. Rapid cell-patterning and microfluidic chip fabrication by crack-free CO2laser ablation on glass. J Micromech Microeng2006; 16: 1143–1153.
52.
SohnI-BLeeM-SWooJ-S, et al. Fabrication of photonic devices directly written within glass using a femtosecond laser. Opt Express2005; 13: 4224–4229.
53.
ArifMRahmanMSanWY, et al. An experimental approach to study the capability of end-milling for microcutting of glass. Int J Adv Manuf Technol2011; 53: 1063–1073.
54.
SlikkerveerPJBoutenPCPde HaasFCM. High quality mechanical etching of brittle materials by powder blasting. Sens Actuators2000; 85: 296–303.
55.
YanBHWangACHuangCY, et al. Study of precision micro-holes in borosilicate glass using micro EDM combined with micro ultrasonic vibration machining. Int J Mach Tools Manuf2002; 42: 1105–1112.
56.
KawasujiYFujimotoJKobayashiM, et al. Deep ultraviolet excimer laser processing for the micro via hole on semiconductor package. J Laser Appl2020; 32: 022076.
57.
HengQTaoCTie-chuanZ. Surface roughness analysis and improvement of micro-fluidic channel with excimer laser. Microfluid Nanofluidics2006; 2: 357–360.
58.
DungchaiWChailapakulOHenryCS. A low-cost, simple, and rapid fabrication method for paper-based microfluidics using wax screen-printing.. Analyst2011; 136: 77–82.
59.
YafiaMShuklaSNajjaranH. Fabrication of digital microfluidic devices on flexible paper-based and rigid substrates via screen printing. J Micromech Microeng2015; 25: 057001.
ThierryCPeterEGöranS. Deep wet etching of borosilicate glass using an anodically bonded silicon substrate as mask. J Micromech Microeng1998; 8: 84.
65.
ZhangJTanKLHongGD, et al. Polymerization optimization of SU-8 photoresist and its applications in microfluidic systems and MEMS. J Micromech Microeng2001; 11: 20–26.
66.
WuLCuiLHeW, et al. Toward controllable wet Etching of monocrystalline silicon: roles of mechanically driven defects. ACS Appl Mater Interfaces2022; 14: 29366–29376.
67.
KasztelanicRFilipkowskiAPyszD, et al. Optical fibers with open side channel by wet etching. Opt Express2018; 26: 32387.
68.
TiggelaarRMBenito-LópezFHermesDC, et al. Fabrication, mechanical testing and application of high-pressure glass microreactor chips. Chem Eng J2007; 131: 163–170.
69.
KwonK-KSongD-SQuanY-J, et al. Crackless glass through-structure fabrication with laser-induced backside wet etching using detachably bonded cover. CIRP Ann2022; 71: 161–164.
70.
HuffM. Recent advances in reactive ion Etching and applications of high-aspect-ratio microfabrication. Micromachines2021; 12: 991.
71.
GerltMSLäubliNFManserM, et al. Reduced etch lag and high aspect ratios by deep reactive ion Etching (DRIE). Micromachines2021; 12: 542.
72.
WangTChenJZhouT. Numerical study on fabricating rectangle microchannel in microfluidic chips by glass molding process. IOP Conf Ser Mater Sci Eng2017; 242: 012097.
73.
MaXLiRJinZ, et al. Injection molding and characterization of PMMA-based microfluidic devices. Microsyst Technol2020; 26: 1317–1324.
74.
ArifMRahmanMSanWY. Ultraprecision ductile mode machining of glass by micromilling process. J Manuf Process2011; 13: 50–59.
75.
PlazaJALopezMJMorenoA, et al. Definition of high aspect ratio glass columns. Sens Actuators2003; 105: 305–310.
76.
Ravi-KumarSLiesBZhangX, et al. Laser ablation of polymers: a review. Polym Int2019; 68: 1391–1401.
77.
ZhangYZhangDWuJ, et al. A thermal model for nanosecond pulsed laser ablation of aluminum. AIP Adv2017; 7: 075010.
78.
LewisLJPerezD. Theory and simulation of laser ablation – from basic mechanisms to applications. In: SugiokaKMeunierMPiquéA (eds) Laser precision microfabrication. Berlin, Heidelberg: Springer, 2010, pp.35–61.
79.
GeQLiZWangZ, et al. Projection micro stereolithography based 3D printing and its applications. Int J Extrem Manuf2020; 2: 022004.
WangXLiuJZhangY, et al. Advances in precision microfabrication through digital light processing: system development, material and applications. Virtual Phys Prototyp2023; 18: e2248101.
82.
QiuJLiJGuoZ, et al. 3D printing of individualized microfluidic chips with DLP-based printer. Materials2023; 16: 6984.
83.
WangHZhangWLadikaD, et al. Two-Photon polymerization lithography for optics and photonics: fundamentals, materials, technologies, and applications. Adv Funct Mater2023; 33: 2214211.
84.
JianBLiHHeX, et al. Two-photon polymerization-based 4D printing and its applications. Int J Extrem Manuf2024; 6: 012001.
85.
ShiromaLSOliveiraAFLobo-JúniorEO, et al. High adhesion strength and hybrid irreversible/reversible full-PDMS microfluidic chips. Anal Chim Acta2017; 951: 116–123.
86.
LiJLiangCZhangH, et al. Reliable and high quality adhesive bonding for microfluidic devices. Micro Nano Lett2017; 12: 90–94.
87.
RenWKimHLeeH-J, et al. A pressure-tolerant polymer microfluidic device fabricated by the simultaneous solidification-bonding method and flash chemistry application. Lab Chip2014; 14: 4263–4269.
88.
GeTGrestGSRobbinsMO. Structure and strength at immiscible polymer interfaces. ACS Macro Lett2013; 2: 882–886.
89.
CompostoRJKramerEJWhiteDM. Matrix effects on diffusion in polymer blends. Macromolecules1992; 25: 4167–4174.
90.
ShahJJGeistJLocascioLE, et al. Capillarity induced solvent-actuated bonding of polymeric microfluidic devices. Anal Chem2006; 78: 3348–3353.
91.
LingNLeeJSLeeNY. Solvent-assisted low-temperature and low-pressure poly(methylmethacrylate) bonding coupled with selective microchannel hydrophobic coating for reliable sealing. Sens Actuators2017; 265: 168–173.
92.
TrinhKTLChaeWRLeeNY. Pressure-free assembling of poly(methyl methacrylate) microdevices via microwave-assisted solvent bonding and its biomedical applications. Biosensors2021; 11: 526.
93.
IshidaKNishitsujiSMiyataK. Effect of temperature and pressure on the interfacial morphology and bond strength of thermally laminated glycol-modified polyethylene terephthalate/styrene-co-butadiene block copolymer films and comparison with coextruded (polyethylene terephthalate/styrene-co-butadiene block copolymer/polyethylene terephthalate) and polyethylene terephthalate/styrene-co-butadiene block copolymer/polyethylene terephthalate films heated with applied pressure after extrusion. J Plast Film Sheeting2022; 38: 263–277.
94.
TrinhKTLLeNXTLeeNY. Chitosan-polydopamine hydrogel complex: a novel green adhesion agent for reversibly bonding thermoplastic microdevice and its application for cell-friendly microfluidic 3D cell culture. Lab Chip2020; 20: 3524–3534.
95.
TsaoC-WSyuW-C. Bonding of thermoplastic microfluidics by using dry adhesive tape. RSC Adv2020; 10: 30289–30296.
96.
ÖzdenNAyhanHErkutS, et al. Coating of silicone-based impression materials in a glow-discharge system by acrylic acid plasma. Dent Mater1997; 13: 174–178.
97.
YahiaLLombardiSSelmaniA, et al. Effect of plasma treatment on tribological properties of synthetic ligaments. Biomed Mater Eng1994; 4: 347–356.
98.
OzdenNAkaltanFSuzerS, et al. Time-related wettability characteristic of acrylic resin surfaces treated by glow discharge. J Prosthet Dent1999; 82: 680–684.
99.
KhandanOStarkDChangA, et al. Wafer-scale titanium anodic bonding for microfluidic applications. Sens Actuators B2014; 205: 244–248.
100.
MrozekP. Anodic bonding of glasses with interlayers for fully transparent device applications. Sens Actuators2009; 151: 77–80.
101.
SzeszEMLepienskiCM. Anodic bonding of titanium alloy with bioactive glass. J Non-Cryst Solids2017; 471: 19–27.
102.
ParkJKOhYJ. Interfacial microstructures and glass strengthening in anodic-bonded Al sheet/glass and sputtered Al film/glass. Microelectron Reliab2014; 54: 641–647.
103.
MrozekP. Glass-to-glass anodic bonding using TiNx interlayers for fully transparent device applications. Sens Actuators2012; 174: 139–143.
104.
DaschnerRKüblerHLöwR, et al. Triple stack glass-to-glass anodic bonding for optogalvanic spectroscopy cells with electrical feedthroughs. Appl Phys Lett2014; 105: 041107.
KumarPPathakM. Droplet formation under wall slip in a microfluidic T-junction. J Mol Liq2022; 345: 117808.
107.
LiuZZhaoJPangY, et al. Generation of droplets in the T-junction with a constriction microchannel. Microfluid Nanofluidics2018; 22: 1–9.
108.
LihFLMiaoJM. Effect of junction configurations on microdroplet formation in a T-junction microchannel. J Appl Mech Tech Phys2015; 56: 220–230.
109.
LiuZ-MLiuL-KShenF. Effects of geometric configuration on droplet generation in Y-junctions and anti-Y-junctions microchannels. Acta Mech Sin2015; 31: 741–749.
110.
MubashirHThorstenPPatricM. Mixing of rarefied gases in T-shape micromixers. Appl Therm Eng2018; 146: 39–44.
111.
CaiGXueLZhangH, et al. A review on micromixers. Micromachines2017; 8: 274.
112.
MatteoASara TomasiMAlessandroM, et al. Mixing improvement in a T-Shaped micro-junction through small rectangular cavities. Micromachines2022; 13: 159.
113.
WangWYuXZhouJ, et al. Improvement of RF performance for AlGaN/GaN HEMT by using a cavity structure. Solid State Electron2016; 126: 32–35.
114.
FatimaUShakaibMMemonI. Analysis of mass transfer performance of micromixer device with varying confluence angle using CFD. Chem Zvesti2020; 74: 1267–1279.
115.
GulatiSVijayakumarKGoodWW, et al. Microdroplet formation in rounded flow-focusing junctions. Microfluid Nanofluidics2016; 20(1): 9.
116.
LeeC-YWangW-TLiuC-C, et al. Passive mixers in microfluidic systems: A review. Chem Eng J2016; 288: 146–160.
117.
LeeC-YFuL-M. Recent advances and applications of micromixers. Sens Actuators B2018; 259: 677–702.
118.
LiuRHStremlerMASharpKV, et al. Passive mixing in a three-dimensional serpentine microchannel. J Microelectromech Syst2000; 9: 190–197.
119.
AnsariMAkimK-Y. Parametric study on mixing of two fluids in a three-dimensional serpentine microchannel. Chem Eng J2009; 146: 439–448.
120.
KanarisAGStogiannisIAMouzaAA, et al. Comparing the mixing performance of common types of chaotic micromixers: a numerical study. Heat Transf Eng2015; 36: 1122–1131.
121.
YangASChuangFCChenCK, et al. A high-performance micromixer using three-dimensional Tesla structures for bio-applications. Chem Eng J2015; 263: 444–451.
122.
XuJChenX. Numerical study on mixing performance of 3D passive micromixer with scaling elements. J Braz Soc Mech Sci Eng2019; 41: 453.
123.
AfzalAKimK. Performance evaluation of three types of passive micromixer with convergent-divergent sinusoidal walls. J Mar Sci Technol2014; 22: 680–686.
124.
SheuTSChenSJChenJJ. Mixing of a split and recombine micromixer with tapered curved microchannels. Chem Eng Sci2012; 71: 321–332.
125.
RazaWKimK-Y. Unbalanced split and recombine micromixer with three-dimensional steps. Ind Eng Chem Res2020; 59: 3744–3756.
126.
TranminhNJohannessenEKarlsenF. Numerical and experimental mixing studies in a split and recombine micromixer with ellipse-like Micropillars. IFMBE Proc2013; 46: 11–14.
127.
MondalBMehtaSKPatowariPK, et al. Numerical study of mixing in wavy micromixers: comparison between raccoon and serpentine mixer. Chem Eng Process Process Intensification2019; 136: 44–61.
128.
SaisornSBenjawunPSuriyawongA, et al. Two-phase flow structures in a helically coiled microchannel: an experimental investigation. Phys Fluids2023; 35: 102012.
129.
GuzniczakEOttoOWhyteG, et al. Deformability-induced lift force in spiral microchannels for cell separation. Lab Chip2020; 20: 614–625.
130.
DeanWR. Fluid motion in a curved channel. Proc R Soc Lond1928; 121: 402–420.
131.
GregorattoIMcneilCReeksM. Micro-devices for rapid continuous separation of suspensions for use in micro-total-analysis-systems (μTAS). Proc SPIE2007; 6465: 1079–1085.
132.
BhagatAAKuntaegowdanahalliSSPapautskyI. Continuous particle separation in spiral microchannels using Dean flows and differential migration. Lab Chip2008; 8: 1906–1914.
133.
SunJLiuCLiM, et al. Size-based hydrodynamic rare tumor cell separation in curved microfluidic channels. Biomicrofluidics2013; 7: 11802.
134.
WangHIovenittiPHarveyE, et al. Optimizing layout of obstacles for enhanced mixing in microchannels. Smart Mater Struct2002; 11: 662–667.
135.
BhagatAASPetersonETKPapautskyI. A passive planar micromixer with obstructions for mixing at low Reynolds numbers. J Micromech Microeng2007; 17: 1017–1024.
136.
LinY-CChungY-CWuCY. Mixing enhancement of the passive microfluidic mixer with J-shaped baffles in the tee channel. Biomed Microdevices2007; 9: 215–221.
137.
Rahman NezhadJMirbozorgiSA. An immersed boundary-lattice Boltzmann method to simulate chaotic micromixers with baffles. Comput Fluids2018; 167: 206–214.
138.
Chul-KyuKJoon-YongY. Optimal design of groove shape on passive micromixer using design of experiment technique. Proc IMechE, Part E: J Process Mechanical Engineering2016; 231: 880–887.
139.
ShiXWangLHuangS, et al. A novel passive micromixer with array of Koch fractal obstacles in microchannel. J Dispers Sci Technol2021; 42: 236–247.
MahdiYDaoudK. Microdroplet size prediction in microfluidic systems via artificial neural network modeling for water-in-oil emulsion formulation. J Dispers Sci Technol2017; 38: 1501–1508.
143.
ZhuKChengSKovalchukN, et al. Analyzing drop coalescence in microfluidic devices with a deep learning generative model. Phys Chem Chem Phys2023; 25: 15744–15755.
144.
PatilDHMudigondaS. The effect of the rolling direction, temperature, and Etching time on the photochemical machining of Monel 400 microchannels. Adv Mater Sci Eng2016; 2016: 1–9.
145.
SreejithKPSharmaAKBasuPK, et al. Etching methods for texturing industrial multi-crystalline silicon wafers: A comprehensive review. Sol Energy Mater Sol Cells2022; 238: 111531.
146.
YounSWKangCG. Maskless pattern fabrication on Pyrex 7740 glass surface by using nano-scratch with HF wet etching. Scr Mater2005; 52: 117–122.
147.
PatilDThoratSSadaiahM. Study of the effect of PCM process parameters on geometry type, Ra, depth of etch, undercut comparing FeCl3 and CuCl2 etchants on Monel 400. Adv Mater Process Technol2023; 1: 1–21.
148.
DuttaSImranMKumarP, et al. Comparison of etch characteristics of KOH, TMAH and EDP for bulk micromachining of silicon (110). Microsyst Technol2011; 17: 1621–1628.
149.
Le Thi NgocLJinMWiedemairJ, et al. Large area metal nanowire arrays with tunable sub-20 nm nanogaps. ACS Nano2013; 7: 5223–5234.
150.
LuHZhangHJinM, et al. Two-Layer microstructures fabricated by one-step anisotropic wet etching of Si in KOH Solution. Micromachines2016; 7: 19.
151.
TaimoorMAlatawiAReuterS, et al. Single-step inductively coupled plasma etching of sputtered Nb2O5/SiO2 multilayer stacks using chromium etch mask. J Vac Sci Technol A2017; 35: 041302.
152.
RongguiSRighiniGC. Characterization of reactive ion etching of glass and its applications in integrated optics. J Vac Sci Technol A1991; 9: 2709–2712.
153.
LeechPW. Reactive ion etching of quartz and silica-based glasses in CF4/CHF3 plasmas. Vacuum1999; 55: 191–196.
154.
ZezeDAForrestRDCareyJD, et al. Reactive ion etching of quartz and Pyrex for microelectronic applications. J Appl Phys2002; 92: 3624–3629.
155.
IchikiTSugiyamaYUjiieT, et al. Deep dry etching of borosilicate glass using fluorine-based high-density plasmas for microelectromechanical system fabrication. J Vac Sci Technol2003; 21: 2188–2192.
156.
ParkJHLeeNELeeJ, et al. Deep dry etching of borosilicate glass using SF6 and SF6/Ar inductively coupled plasmas. Microelectron Eng2005; 82: 119–128.
157.
PatilTC. Cl2/Ar based dry etching of GaCrN using inductively coupled plasma. RSC Adv2016; 6: 68619–68626.
158.
LinLJingXLiuF, et al. Deep dry etching of fused silica using C4F8/Ar inductively coupled plasmas. J Mater Sci Mater Electron2017; 28: 480–486.
159.
MaoMWangYBogaertsA. Numerical study of the plasma chemistry in inductively coupled SF6 and SF6/Ar plasmas used for deep silicon etching applications. J Phys D Appl Phys2011; 44: 435202.
160.
LeeD-HParkK-HHongL-Y, et al. SiCN ceramic patterns fabricated by soft lithography techniques. Sens Actuators2007; 135: 895–901.
161.
RogersJANuzzoRG. Recent progress in soft lithography. Mater Today2005; 8: 50–56.
162.
ChungSImYChoiJ, et al. Microreplication techniques using soft lithography. Microelectron Eng2004; 75: 194–200.
163.
HanXZhangYTianJ, et al. Polymer-based microfluidic devices: A comprehensive review on preparation and applications. Polym Eng Sci2022; 62: 3–24.
164.
ConveryNGadegaardN. 30 years of microfluidics. Micro Nano Eng2019; 2: 76–91.
165.
MukherjeePNebuloniFGaoH, et al. Rapid Prototyping of soft lithography masters for microfluidic devices using dry film photoresist in a Non-Cleanroom setting. Micromachines2019; 10: 192.
166.
Prince KumarRMonsurIAnkurG. Microfluidic devices for the detection of contamination in water samples: a review. Sens Actuators2022; 347: 113926.
167.
ZhangLZolfaghariAZhouW, et al. Flexible metallic mold based precision compression molding for replication of micro-optical components onto non-planar surfaces. Precis Eng2022; 76: 149–159.
168.
Abdul ManafARYanJ. Improvement of form accuracy and surface integrity of Si-HDPE hybrid micro-lens arrays in press molding. Precis Eng2017; 47: 469–479.
169.
LiuJShangJTangJ, et al. Micromachining of Pyrex 7740 glass by silicon molding and vacuum anodic bonding. J Microelectromech Syst2011; 20: 909–915.
170.
AlberoJPerrinSBargielS, et al. Dense arrays of millimeter-sized glass lenses fabricated at wafer-level. Opt Express2015; 23: 11702–11712.
171.
AmnacheANeumannJFrechetteLG. Capabilities and limits to form high aspect-ratio microstructures by molding of borosilicate Glass. J Microelectromech Syst2019; 28: 432–440.
172.
ChangJHYangSY. Gas pressurized hot embossing for transcription of micro-features. Microsyst Technol2003; 10: 76–80.
173.
JungJHDestgeerGParkJ, et al. Microfluidic flow switching via localized acoustic streaming controlled by surface acoustic waves. RSC Adv2018; 8: 3206–3212.
174.
YanJWSasakiTTamakiJ, et al. Chip Formation behaviour in ultra-precision cutting of electroless nickel plated mold substrates. Key Eng Mater2004; 257–258: 3–8.
175.
YanJZhouTYoshiharaN, et al. Shape transferability and microscopic deformation of molding dies in aspherical glass lens molding press. J Manuf Technol Res2009; 1: 85–102.
176.
MeiFPhillipsWALuB, et al. Fabrication of copper-based microchannel devices and analysis of their flow and heat transfer characteristics. J Micromech Microeng2009; 19: 035009.
177.
FangFZ. Nano-turning of single crystal silicon. J Mater Process Technol1998; 82: 95–101.
178.
LiuKLiXLiangSY, et al. Nanometer-Scale, ductile-mode cutting of soda-lime glass. J Manuf Process2005; 7: 95–101.
MostofaMMohammadMSimonS, et al. Micromechanical machining of soda lime glass. Int J Adv Manuf Technol2012; 67: 1139–1150.
181.
ArifMRahmanMSanWY. An experimental study on the machining characteristics in ductile-mode milling of BK-7 glass. Int J Adv Manuf Technol2012; 60: 487–495.
182.
ChengYSugiokaKMidorikawaK. Microfabrication of 3D hollow structures embedded in glass by femtosecond laser for lab-on-a-chip applications. Appl Surf Sci2005; 248: 172–176.
183.
GiridharMSSeongKSchülzgenA, et al. Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices. Appl Opt2004; 43: 4584–4589.
184.
SugiokaKChengYMidorikawaK. 3D micromachining of photosensitive glass by femtosecond laser for microreactor manufacture. J Photopolym Sci Technol2004; 17: 397–402.
185.
SugiokaKChengYMidorikawaK. Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture. Appl Phys A2005; 81(1): 1–10.
186.
WaliaRSKumarSGroverS. Optimisation strategies in ultrasonic vibration assisted electrical discharge machining: a review. Int J Precis Technol2017; 7: 51.
187.
ChengJPerrieWSharpM, et al. Single-pulse drilling study on Au, Al and Ti alloy by using a picosecond laser. Appl Phys A2009; 95: 739–746.
188.
AnconaANodopDLimpertJ, et al. Microdrilling of metals with an inexpensive and compact ultra-short-pulse fiber amplified microchip laser. Appl Phys A2009; 94: 19–24.
189.
HuWShinYCKingGB. Micromachining of metals, alloys, and ceramics by picosecond laser ablation. J Manuf Sci Eng2010; 132: 165–174.
190.
BeresnaMGecevičiusMKazanskyPG. Ultrafast laser direct writing and nanostructuring in transparent materials. Adv Opt Photonics2014; 6: 293–339.
ItohKWatanabeWNolteS, et al. Ultrafast processes for bulk modification of transparent materials. MRS Bull2011; 31: 620–625.
193.
LiuMZhangCLiuF. Understanding wax screen-printing: a novel patterning process for microfluidic cloth-based analytical devices. Anal Chim Acta2015; 891: 234–246.
194.
MonkkonenLEdgarJSWintersD, et al. Screen-printed digital microfluidics combined with surface acoustic wave nebulization for hydrogen-deuterium exchange measurements. J Chromatogr A2016; 1439: 161–166.
195.
ShangguanJ-WLiuYPanJ-B, et al. Microfluidic PDMS on paper (POP) devices. Lab Chip2016; 17: 120–127.
196.
LeNNPhanHCTTranHK, et al. Fabrication of paper-based microfluidic channels by electrohydrodynamic inkjet printing technology for analytical biochemistry applications. Int J Nanotechnol2020; 17: 673.
197.
BiswasARoySS. A review on multi nozzle electrohydrodynamic inkjet printing system for MEMS applications. IOP Conf Ser Mater Sci Eng2021; 1136: 012015.
198.
KhanARahmanKKimDS, et al. Direct printing of copper conductive micro-tracks by multi-nozzle electrohydrodynamic inkjet printing process. J Mater Process Technol2012; 212: 700–706.
199.
CapelAJEdmondsonSChristieSD, et al. Design and additive manufacture for flow chemistry. Lab Chip2013; 13: 4583–4590.
200.
JiangYWangYHeH, et al. Constrained window design in projection stereolithography for continuous three-dimensional printing. 3D Print Addit Manuf2020; 7: 163–169.
201.
Darkes-BurkeyCShepherdRF. High-resolution 3D printing in seconds. Nature2020; 588: 594–595.
202.
JenaRKYueCYAnandL. Improvement of thermal bond strength and surface properties of cyclic olefin copolymer (COC) based microfluidic device using the photo-grafting technique. Sens Actuators B Chem2011; 157: 518–526.
SchwabADAgraDMGKimJ-H, et al. Surface Dynamics in rubbed polymer thin films probed with optical birefringence measurements. Macromolecules2000; 33: 4903–4909.
205.
ShadpourHMusyimiHChenJ, et al. Physiochemical properties of various polymer substrates and their effects on microchip electrophoresis performance. J Chromatogr A2006; 1111: 238–251.
206.
LiuYGanserDSchneiderA, et al. Microfabricated polycarbonate CE devices for DNA analysis. Anal Chem2001; 73: 4196–4201.
207.
CaoYBontrager-SingerJZhuL. A 3D microfluidic device fabrication method using thermopress bonding with multiple layers of polystyrene film. J Micromech Microeng2015; 25: 65014.
208.
RoySYueCYWangZY, et al. Thermal bonding of microfluidic devices: factors that affect interfacial strength of similar and dissimilar cyclic olefin copolymers. Sens Actuators B2012; 161: 1067–1073.
209.
KazumaKRyoheiHTakuS, et al. Low-deformation precision thermal bonding of nanostructured microfluidic chips. Jpn J Appl Phys2020; 59: SIIJ08.
210.
WanAMSadriAYoungEW. Liquid phase solvent bonding of plastic microfluidic devices assisted by retention grooves. Lab Chip2015; 15: 3785–3792.
211.
TrinhKTLThaiDAChaeWR, et al. Rapid fabrication of poly(methyl methacrylate) devices for Lab-on-a-Chip applications using acetic acid and UV treatment. ACS Omega2020; 5: 17396–17404.
212.
FaghihMMSharpMK. Solvent-based bonding of PMMA–PMMA for microfluidic applications. Microsyst Technol2019; 25: 3547–3558.
213.
YinZWangW. A novel bonding method for fabrication of PMMA nanofluidic chip with low deformation of the nano-trenches. Microfluid Nanofluidics2018; 22: 99.
214.
ChenP-CDuongLH. Novel solvent bonding method for thermoplastic microfluidic chips. Sens Actuators B2016; 237: 556–562.
215.
ElKhouryLBergJC. Strategies for the enhancement of adhesion between carbon fibers and polyolefin matrices. J Adhes Sci Technol2023; 37: 897–912.
216.
Hassanpour-TamrinSSanati-NezhadASenA. A simple and low-cost approach for irreversible bonding of polymethylmethacrylate and polydimethylsiloxane at room temperature for high-pressure hybrid microfluidics. Sci Rep2021; 11: 4821.
217.
LiXWuNRojanasakulY, et al. Selective stamp bonding of PDMS microfluidic devices to polymer substrates for biological applications. Sens Actuators2013; 193: 186–192.
218.
ChenP-CLiuY-MChouH-C. An adhesive bonding method with microfabricating micro pillars to prevent clogging in a microchannel. J Micromech Microeng2016; 26: 045003.
219.
LensJSpaayBTerlingenJ, et al. Mechanism of the immobilization of surfactants on polymer surfaces by means of an argon plasma treatment: influence of UV radiation. Plasmas Polym1999; 4: 159–182.
220.
SellamJHamdiHRoyC, et al. Comparison of in vitro-specific blood tests with tuberculin skin test for diagnosis of latent tuberculosis before anti-TNF therapy. Ann Rheum Dis2007; 66: 1610–1615.
221.
MunMKKimDSKimDW, et al. Plasma press for improved adhesion between flexible polymer substrate and inorganic material. Int J Adhes Adhes2019; 89: 59–65.
222.
BhattacharyyaAKlapperichCM. Mechanical and chemical analysis of plasma and ultraviolet-ozone surface treatments for thermal bonding of polymeric microfluidic devices. Lab Chip2007; 7: 876–882.
223.
HoangMVChungHJEliasAL. Irreversible bonding of polyimide and polydimethylsiloxane (PDMS) based on a thiol-epoxy click reaction. J Micromech Microeng2016; 26: 105019.
224.
RoySYueCYLamYC. Influence of plasma surface treatment on thermal bonding and flow behavior in cyclic olefin copolymer (COC) based microfluidic devices. Vacuum2011; 85: 1102–1104.
225.
RoySYueCY. Surface modification of COC microfluidic devices: A comparative study of nitrogen plasma treatment and its advantages over argon and oxygen plasma treatments. Plasma Process Polym2011; 8: 432–443.
226.
MatsumaeTFengwenMFukumotoS, et al. Heterogeneous GaN-Si integration via plasma activation direct bonding. J Alloys Comp2021; 852: 156933.
227.
ChungG-SKimJ-M. Anodic bonding characteristics of MLCA/Si-wafer using a sputtered Pyrex #7740 glass layer for MEMS applications. Sens Actuators2004; 116: 352–356.
228.
van HelvoortATJKnowlesKMHolmestadR, et al. Anodic oxidation during electrostatic bonding. Philos Mag2004; 84: 505–519.
229.
InomataCROgawaHIshikawaK, et al. Infrared spectroscopy study of chemical oxides formed by a sequence of RCA standard cleaning treatments. J Electrochem Soc1996; 143: 2995–3000.
230.
YangCRWuJWChangLY. Design and implementation of a novel conical electrode for fast anodic bonding. J Micromech Microeng2014; 24: 105010.
231.
SundareshSDeshpandeMGSundaramKB. New inexpensive simple experimental setup for anodic bonding of silicon-glass. ECS J Solid State Sci Technol2021; 10: 054002.
232.
NishikawaSTakahashiM. Effect of application of opposite polarity voltage on interface separation of anodically bonded kovar alloy–borosilicate glass joints. Sens Actuators2019; 296: 367–374.
233.
JoyceRSinghKSharmaH, et al. Low cost anodic bonding for MEMS packaging applications. Microsyst Technol2014; 20: 1153–1158.
234.
WeiJXieHNaiML, et al. Low temperature wafer anodic bonding. J Micromech Microeng2003; 13: 217–222.
235.
BeheraBDhanekarSSinghG, et al. Self-encapsulated DC MEMS switch using recessed cantilever beam and anodic bonding between silicon and glass. Microsyst Technol2021; 27: 863–869.
236.
HowladerMMRKibriaMGZhangF. Hybrid plasma bonding of germanium and glass wafers at low temperature. Mater Lett2010; 64: 1532–1535.
237.
MolinaMAsadian-BirjandMBalachJ, et al. Stimuli-responsive nanogel composites and their application in nanomedicine. Chem Soc Rev2015; 44: 6161–6186.
238.
SchlautmannSBesselinkGAJPrabhuGR, et al. Fabrication of a microfluidic chip by UV bonding at room temperature for integration of temperature-sensitive layers. J Micromech Microeng2003; 13: S81–S84.
239.
JinghuiZJianyunHXidanL, et al. Experimental study on the bonding of microfluidic chip. IOP Conf Ser Mater Sci Eng2020; 733: 012026.
240.
LiuKXiangJAiZ, et al. PMMA microfluidic chip fabrication using laser ablation and low temperature bonding with OCA film and LOCA. Microsyst Technol2017; 23: 1937–1942.
241.
LiLHuangYFanY. Low-cost irreversible blue diode laser transmission welding of poly(methyl methacrylate)-based microfluidics. Appl Phys A2022; 128: 1098.
242.
TsaoC-WChangC-YHuWW, et al. Bonding of thermoplastic microfluidic device by water assistance. Int J Adhes Adhes2023; 125: 103429.
243.
SuWQiuJMeiY, et al. A microfluidic cell chip for virus isolation via rapid screening for permissive cells. Virol Sin2022; 37: 547–557.
244.
WatsonCLiuCAnsariA, et al. Multiplexed microfluidic chip for cell co-culture. Analyst2022; 147: 5409–5418.
245.
ZhangYHuangLGuoJ, et al. Study on microfluidic chip flow rate uniformity for cell activity detection. Langmuir2023; 39: 6548–6555.
246.
ChenHHNguyenTVShihYH, et al. Combining microfluidic chip and low-attachment culture devices to isolate oral cancer stem cells. J Dent Sci2024; 19: 560–567.
247.
LiuYYangQCaoL, et al. Analysis of leukocyte behaviors on microfluidic chips. Adv Healthc Mater2019; 8: 1801406.
248.
LiW-MRenX-DJiangY-Z, et al. Rapid detection of EGFR mutation in CTCs based on a double spiral microfluidic chip and the real-time RPA method. Anal Bioanal Chem2023; 415: 3535–3547.
249.
WeiZFanPJiaoY, et al. Integrated microfluidic chip for on-line proteome analysis with combination of denaturing and rapid digestion of protein. Anal Chim Acta2020; 1102: 1–10.
250.
SongZLiMLiB, et al. Automatic detecting and counting magnetic beads-labeled target cells from a suspension in a microfluidic chip. Electrophoresis2019; 40: 897–905.
251.
CaoCHuJLiS, et al. Intensified Fischer–Tropsch synthesis process with microchannel catalytic reactors. Catal Today2009; 140: 149–156.
252.
SzymborskiTJankowskiPGarsteckiP. Teflon microreactors for organic syntheses. Sens Actuators B2018; 255: 2274–2281.
253.
AshikariYSaitoKNokamiT, et al. Oxo-thiolation of cationically polymerizable alkenes using flow microreactors. Chem Eur J2019; 25: 15239–15243.
254.
GageJRGuoXTaoJ, et al. High output continuous nitration. Org Process Res Dev2012; 16: 930–933.
255.
HaoNNieYZhangJXJ. Microfluidic synthesis of functional inorganic micro-/nanoparticles and applications in biomedical engineering. Int Mater Rev2018; 63: 461–487.
256.
AbievRSZdravkovAVKudryashovaYS, et al. Synthesis of calcium fluoride nanoparticles in a microreactor with intensely swirling flows. Russ J Inorg Chem2021; 66: 1047–1052.
257.
HeZSantosJLTianH, et al. Scalable fabrication of size-controlled chitosan nanoparticles for oral delivery of insulin. Biomaterials2017; 130: 28–41.
258.
SahoreVSonkerMNielsenAV, et al. Automated microfluidic devices integrating solid-phase extraction, fluorescent labeling, and microchip electrophoresis for preterm birth biomarker analysis. Anal Bioanal Chem2018; 410: 933–941.
259.
ParviziFParvarehAHeydariR. Liquid-phase microextraction using the microfluidic chip for the extraction of mesalazine from water and biological samples. Microchem J2022; 181: 107752.
260.
KimJ-YYeoM-K. A fabricated microfluidic paper-based analytical device (μPAD) for in situ rapid colorimetric detection of microorganisms in environmental water samples. Mol Cell Toxicol2016; 12: 101–109.
261.
AlmeidaMIGSJayawardaneBMKolevSD, et al. Developments of microfluidic paper-based analytical devices (μPADs) for water analysis: A review. Talanta2018; 177: 176–190.
262.
CardosoTMGGarciaPTColtroWKT. Colorimetric determination of nitrite in clinical, food and environmental samples using microfluidic devices stamped in paper platforms. Anal Methods2015; 7: 7311–7317.
263.
TahirbegiIBEhgartnerJSulzerP, et al. Fast pesticide detection inside microfluidic device with integrated optical pH, oxygen sensors and algal fluorescence. Biosens Bioelectron2016; 88: 188–195.
