This article proposes a robotic precision assembly system for the typical parts of microstructures such as non-silicon microelectromechanical system parts. The assembly system contains three parallel assembly units and support system. In each unit, the images of the base part and target part can be obtained simultaneously from the coaxial alignment vision detection module. This article proposes a system calibration method to ensure accuracy of assembly system. Assembly experiments and accuracy validation tests are conducted. The experimental results show that the synthesizing assembly accuracy of the robotic precision assembly system can reach higher than 3 µm and the mean assembly cycle time of each part is less than 20 s, including the time for feeding and unloading parts. The robotic precision assembly system with nondestructive imaging and gripping can save on cost, achieve better quality results in less time, and greatly facilitate the precision assembly reliability and automation of microstructures.
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