An integrated multilayer ceramic piezoelectric micropump for microfluidic systems

A package-level peristaltic piezoelectric micropump has been designed and fabricated in utilizing multilayer ceramic fabrication methods. The device was fabricated using commercially available low-temperature cofired ceramic materials and a custom-designed low-temperature cofired ceramic compatible piezoelectric ceramic composition. The assembled multilayer pump structure was sintered in single cofiring step. Performance testing resulted in observed unloaded bidirectional flow rates of 450 µL/min and a blocking pressure of 1.4 kPa when the pump was operated at a voltage of 100 V_pp (with a phase difference of 120°) with a frequency of 100 Hz. It was further shown that incorporation of diffuser elements into the microfluidic interconnects was used to increase the blocking pressure capabilities at the expense of flow rate and bidirectional flow characteristics. Alternatively, by maintaining a uniform channel width but varying channel cross section width over height ratio (W/H), an unloaded flow rate of 630 µL/min with an enhancement of blocking pressure (1.55 kPa) was achieved for W/H = 3 (and the same drive conditions as above). The resulting multilayer ceramic-based piezoelectric micropump offers a compact planar pump design, with significant performance advantages, and design flexibility compared to competing micropump technologies.