Recently, vibration energy harvesting devices have gained growing interests. One of the main requirements for them is a broad bandwidth owing to stochastic spectral characteristics of the general vibration sources. Among various approaches for wide bandwidth, curved-beam hinges are quite attractive due to their simple structures. Although there have been several reports on curved beams, a more detailed study is needed. The device under study is an electret-based one with balanced comb-drive configuration. The whole system is modeled by using nonlinear stochastic differential equations. The numerical analysis results show that there is an optimum curve height for maximum power output, which depends on various conditions, such as external vibration strength, comb-drive dimensions, and initial electret charges. At the external acceleration magnitude of 0.02g and 0.05g, the device with curved beams can produce up to 2.9 times and 4.8 times higher power output, respectively, than one with straight beams for given device geometries. To the contrary, at lower and higher vibration magnitudes, straight-beam devices harvest more energy than curved-beam ones. Therefore, it can be concluded that the curved beam height needs to be carefully determined based on the conditions of the application, especially on the characteristics of the external vibration sources.
AndoBBaglioSBulsaraAR, et al. (2014) A bistable buckled beam based approach for vibrational energy harvesting. Sensors and Actuators A: Physical211: 153–161.
2.
AndoBBaglioSL’EpiscopoG, et al. (2012) Investigation on mechanically bistable MEMS devices for energy harvesting from vibrations. Journal of Microelectromechanical Systems21(4): 779–790.
3.
BolandJChaoYHSuzukiY, et al. (2003) Micro electret power generator. In: Sixteenth annual international conference on micro electro mechanical systems, MEMS-03, Kyoto, Japan, 23 January 2003, pp.538–541. New York: IEEE.
4.
Casals-TerreJFargas-MarquesAShkelAM (2008) Snap-action bistable micromechanisms actuated by nonlinear resonance. Journal of Microelectromechanical Systems17(5): 1082–1093.
5.
CottoneFGammaitoniLVoccaH, et al. (2012) Piezoelectric buckled beams for random vibration energy harvesting. Smart Materials and Structures21(3): 035021.
6.
CottoneFVoccaHGammaitoniL (2009) Nonlinear energy harvesting. Physical Review Letters102: 080601.
7.
De PaulaASInmanDJSaviMA (2015) Energy harvesting in a nonlinear piezomagnetoelastic beam subjected to random excitation. Mechanical Systems and Signal Processing54: 405–416.
8.
DhoteSLiHYangZ (2019) Multi-frequency responses of compliant orthoplanar spring designs for widening the bandwidth of piezoelectric energy harvesters. International Journal of Mechanical Sciences157: 684–691.
9.
DuHChauFSZhouG (2018) Harmonically-driven snapping of a micromachined bistable mechanism with ultra-small actuation stroke. Journal of Microelectromechanical Systems27(1): 34–39.
10.
EltananyAMYoshimuraTFujimuraN, et al. (2017) Development of piezoelectric bistable energy harvester based on buckled beam with axially constrained end condition for human motion. Japanese Journal of Applied Physics56(10S): 10PD02.
11.
ErturkAHoffmannJInmanDJ (2009) A piezomagnetoelastic structure for broadband vibration energy harvesting. Applied Physics Letters94(25): 254102.
12.
FerrariMBauMGuizzettiM, et al. (2011) A single-magnet nonlinear piezoelectric converter for enhanced energy harvesting from random vibrations. Sensors and Actuators A: Physical172(1): 287–292.
13.
FuQSuzukiY (2014) MEMS vibration electret energy harvester with combined electrodes. In: 27th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, CA, USA, 26–30 January 2014, pp.409–412. New York: IEEE.
14.
HagiwaraKGotoMIguchiY, et al. (2012) Electret charging method based on soft X-ray photoionization for MEMS transducers. IEEE Transactions on Dielectrics and Electrical Insulation19(4): 1291–1298.
15.
HahD (2021) Effects of curved-beam heights to harvested energy in a balanced comb-drive configuration. In: 2021 Symposium on design, test, integration & packaging of MEMS and MOEMS (DTIP), Paris, France, 25–27 August 2021. New York: IEEE.
HonmaHMitsuyaHHashiguchiG, et al. (2018) Improvement of energy conversion effectiveness and maximum output power of electrostatic induction-type MEMS energy harvesters by using symmetric comb-electrode structures. Journal of Micromechanics and Microengineering28(6): 064005.
18.
HonmaHTohyamaYToshiyoshiH (2019) A 1.3 milliwatts electrostatic vibrational energy harvester with minimal reactive power through reduced internal stray capacitances. In: Transducers 2019 – Eurosensors XXXIII, Berlin, Germany, 23–27 June 2019, pp.362–365. New York: IEEE.
19.
JangSJRustighiEBrennanMJ, et al. (2011) Design of a 2DOF vibrational energy harvesting device. Journal of Intelligent Material Systems and Structures22(5): 443–448.
20.
KimIHJungHJLeeBM, et al. (2011) Broadband energy-harvesting using a two degree-of-freedom vibrating body. Applied Physics Letters98(21): 214102.
21.
KloedenPPlatenE (1995) Numerical Solution of Stochastic Differential Equations. New York: Springer-Verlag.
22.
LacarbonaraWNayfehAHKreiderW (1998) Experimental validation of reduction methods for nonlinear vibrations of distributed-parameter systems: Analysis of a buckled beam. Nonlinear Dynamics17(2): 95–117.
23.
LiXYuKUpadrashtaD, et al. (2019) Multi-branch sandwich piezoelectric energy harvester: Mathematical modeling and validation. Smart Materials and Structures28(3): 035010.
24.
LitakGFriswellMIAdhikariS (2010) Magnetopiezoelastic energy harvesting driven by random excitations. Applied Physics Letters96(21): 214103.
25.
LiuWFormosaFBadelA, et al. (2016) Investigation of a buckled beam generator with elastic clamp boundary. Smart Materials and Structures25(11): 115045.
26.
LuQFangWWangC, et al. (2021) Investigation of a complete squeeze-film damping model for MEMS devices. Microsystems & Nanoengineering7: 54.
27.
MeningerSMur-MirandaJOAmirtharajahR, et al. (1999) Vibration-to-electric energy conversion. In: Proceedings of the 1999 international symposium on Low power electronics and design, San Diego, CA, USA, 16–17 August 1999, pp.48–53. New York: IEEE.
28.
NguyenSDHalvorsenE (2011) Nonlinear springs for bandwidth-tolerant vibration energy harvesting. Journal of Microelectromechanical Systems20(6): 1225–1227.
29.
NguyenSDHalvorsenEPaprotnyI (2013) Bistable springs for wideband microelectromechanical energy harvesters. Applied Physics Letters102(2): 023904.
30.
PereiraTLde PaulaASFabroAT, et al. (2019) Random effects in a nonlinear vibration-based piezoelectric energy harvesting system. International Journal of Bifurcation and Chaos29(04): 1950046.
31.
QiuJLangJHSlocumAH (2004) A curved-beam bistable mechanism. Journal of Microelectromechanical Systems13(2): 137–146.
32.
RoundySWrightPKRabaeyJ (2003) A study of low level vibrations as a power source for wireless sensor nodes. Computer Communications26(11): 1131–1144.
33.
ScerriJGrechIGattE, et al. (2015) Reduced-order model for MEMS PZT vibrational energy harvester exhibiting buckling bistability. Electronics Letters51(5): 409–411.
34.
SebaldGKuwanoHGuyomarD, et al. (2011) Experimental Duffing oscillator for broadband piezoelectric energy harvesting. Smart Materials and Structures20(10): 102001.
35.
SenturiaSD (2007) Microsystem Design. New York: Springer Science & Business Media.
36.
SterkenTBaertKPuersR, et al. (2003) A new power MEMS component with variable capacitance. In: Pan Pacific Mircoelectronics Symposium, Island of Hawaii, HI, USA, 18–20 February 2003, pp.27–34. Eden Prairie: Surface Mount Technology Association.
37.
TangLYangY (2012) A multiple-degree-of-freedom piezoelectric energy harvesting model. Journal of Intelligent Material Systems and Structures23(14): 1631–1647.
38.
TorresEORincon-MoraGA (2006) Electrostatic energy harvester and Li-ion charger circuit for micro-scale applications. In: 49th IEEE International Midwest Symposium on Circuits and Systems, San Juan, PR, USA, 6–9August2006, pp.65–69. New York: IEEE
39.
UpadrashtaDYangY (2018) Trident-shaped multimodal piezoelectric energy harvester. Journal of Aerospace Engineering31(5): 04018070.
40.
Van BlariganLDanzlPMoehlisJ (2012) A broadband vibrational energy harvester. Applied Physics Letters100(25): 253904.
41.
WuHTangLYangY, et al (2013) A novel two-degrees-of-freedom piezoelectric energy harvester. Journal of Intelligent Material Systems and Structures24(3): 357–368.
42.
XiaoZYangTQDongY, et al. (2014) Energy harvester array using piezoelectric circular diaphragm for broadband vibration. Applied Physics Letters104(22): 223904.
43.
XueHHuYWangQM (2008) Broadband piezoelectric energy harvesting devices using multiple bimorphs with different operating frequencies. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control55(9): 2104–2108.
44.
YangZTangLTaoK, et al. (2019) Modelling and validation of electret–based vibration energy harvesters in view of charge migration. International Journal of Precision Engineering and Manufacturing-Green Technology8(1): 113–123.
45.
ZhangYWangTLuoA, et al. (2018) Micro electrostatic energy harvester with both broad bandwidth and high normalized power density. Applied Energy212: 362–371.
46.
ZhaoSErturkA (2012) Electroelastic modeling and experimental validations of piezoelectric energy harvesting from broadband random vibrations of cantilevered bimorphs. Smart Materials and Structures22(1): 015002.
47.
ZhouWChenYPengB, et al. (2014) Air damping analysis in comb microaccelerometer. Advances in Mechanical Engineering6: 373172.
48.
ZhuYZuJW (2013) Enhanced buckled-beam piezoelectric energy harvesting using midpoint magnetic force. Applied Physics Letters103(4): 041905.
