Robust tracking for nanopositioning stages using sliding mode control with active disturbance rejection: Design and implementation

This paper presents the design and implementation of a novel sliding mode control integrated with active disturbance rejection (SMCDR) for precise robust trajectory tracking of piezoelectric nanopositioning stages. The model uncertainties, nonlinearity, and external disturbances of the piezoelectric nanopositioning stage are regarded as a lumped disturbance, which is estimated by an extended state observer. The active disturbance rejection control (ADRC) strategy is used to realize a preliminary trajectory tracking, while the sliding mode control is adopted to handle the estimation error and residual uncertainties, and to improve the tracking performance. The exponential stability of the proposed SMCDR is proved using Lyapunov’s direct method. The proposed SMCDR controller combines the strength of both ADRC and sliding mode control, exhibits a simple structure, requires only the position measurements, and does not require any information of model parameters except for an approximate constant gain. Experimental results reveal the robustness of the SMCDR approach in suppressing the hysteresis of piezoelectric actuator, and illustrate the superior performance over conventional ADRC, integral sliding mode controller (ISMC) and PID controller for trajectory tracking control of piezoelectric nanopositioning stages.