A micro-LED release method for transfer technology based on vibration

Micro-LEDs are suitable as special light sources that serve as small sensors and light sources for optical communication. The most important technology for these applications is Micro-LED high-precision transfer (±0.5 μm positional accuracy). The existing Micro-LED transfer technology has the problem of low position accuracy. This study proposes a high-position-precision transfer method based on vibrations. A single Micro-LED transfer system based on a microgripper was designed to achieve high-precision positioning. Compared with other methods, this method can be used in conjunction with a microscope camera to achieve high-precision transfer of Micro-LED. To test the performance of our proposed method, a Micro-LED, with a length of approximately 40, width of 20, and thickness of 4 μm, was transferred. The performance of the proposed method was tested. Subsequently, a 5 × 6 Micro-LED array was transferred. The results show that 2 out of 30 have a positional deviation exceeding 3 μm, so this is a transfer failure. The success rate was >90%. The root-mean-square error of the Micro-LED position was approximately 0.8 μm. The experimental results show that this method exhibits good performance for Micro-LED transfers.