Abstract
Numerical simulation was used to predict the profile of a three-dimensional aspherical microlens and a microprism array. Based on the simulated results, the desired micro-optical lens profile was obtained using excimer laser ablated polyimide. The simulation method applied to excimer laser ablation can significantly reduce the quantity of microablation experiments. Ablated microstructures with surface roughness R a < 20 nm were successfully achieved for micro-optical components. The excimer laser ablation parameters included laser fluence, shot number, workstation velocity, and repetition rate. Numerical simulation can be applied to predict various profiles of microlens and microprism arrays with different dimensions, the desired geometries being formed by laser ablation.
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