“Quantitative” Electron Probe Analysis of Low-Atomic-Number Samples with Irregular Surfaces

Abstract

The quantitative electron probe analysis on irregular surfaces via the two-voltage technique was assessed for light elements. This analysis can be performed without the knowledge of the local tilt angle, i.e., the take-off angle. Data are presented of compositions determined on crystal facets with widely varied orientations with respect to the detector. A range of model compounds and commercial products was investigated with special emphasis on those consisting of low-atomic-number elements. The usefulness of the technique, its disadvantages, and limitations are critically evaluated. The precision and accuracy obtainable in routine laboratory work are quantified and the effect of the selection of the accelerating voltage pairs and magnification is discussed.

Keywords

Electron microprobe

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