Abstract
The field of materials characterisation encompasses a wide range of methods and related research communities. This has led to a proliferation of terminologies and data management approaches, hindering collaboration and interoperability. In this work, a domain ontology designed to model the common aspects across the different characterisation methodologies is presented. This ontology, called the CHAMEO ontology, is based on a recent CEN Workshop Agreement (CWA 17815) which introduced a standardised terminology and the Characterisation Data (CHADA) documentation scheme. The goal of CHAMEO is to provide a framework for harmonising the underlying method-specific ontologies, which can be developed by reusing and specialising the generic constructs of the CHAMEO ontology. This work is part of a broader initiative under the umbrella of the European Materials Modelling Council (EMMC), for the development of interconnected materials modelling ontologies based on a common root that is the Elementary Multiperspective Material Ontology (EMMO). The CHAMEO ontology was developed within the NanoMECommons European project that has the goal of harmonising characterisation protocols. The CHAMEO ontology has also been aligned with a number of recently developed, EMMO-based domain ontologies for the classification of materials, models, manufacturing processes and software products related to Materials Modelling.
Keywords
Introduction
The huge variety and complexity of materials led to the formation of multiple communities around the materials characterisation field, establishing different terminologies typically focusing on specific application domains. This work represents a contribution to the creation of a common knowledge framework for the documentation of characterisation methods, with the goal of facilitating reusability and transferability of knowledge across different communities and sectors.
Specifically, this work describes the CHAMEO ontology, conceived to be a reference framework for the description of materials characterisation procedures. The CHAMEO ontology models the generic aspects that are in common across the different characterisation techniques, providing definitions at the methodological level. Specific ontologies for modelling the different characterisation techniques could then be developed by specialising the CHAMEO definitions. This follows a modular design approach that increases the level of reusability and interoperability and reduces the effort for maintaining the ontologies.
The development of the CHAMEO ontology has been carried out under the European project NanoMECommons (NanoMECommons, 2021–2025) that aims to develop harmonised and widely accepted characterisation protocols. These protocols are meant to be integrated into real industrial environments in order to boost material, process, and product reliability, by reducing measurement discrepancies and improving data interoperability and traceability. To pursue this goal, ontologies play a central role, providing a unique and interoperable metadata structure and enhancing data quality and information management. Their purpose is to support the establishment of data-driven structure-property relationships and thus assist the quality assurance and material design procedures in industry. The ultimate objectives are to bring about semantics-based standards for materials characterisation and to contribute directly to Industry Commons, i.e. facilitating reusability and transferability of characterisation data across multiple manufacturing sectors.
The CHAMEO ontology is a key part of bringing about the overarching goal of NanoMECommons to provide a harmonised and standardised representation of materials characterisation, including multi-technique protocols.
NanoMECommons is one of a number of European projects under the umbrella of the European Materials Characterisation Council (EMCC, 2016–2022) and the European Materials Modelling Council (EMMC, 2014–2022) which have the broader goal of fostering the interaction and collaboration among different stakeholders in the area of Materials Science, and facilitating integration and interoperability of materials modelling and characterisation. For this purpose, in a multidisciplinary effort, the Elementary Multiperspective Material Ontology (EMMO) (The EMMC Consortium, 2014–2021) has been developed as a representational ontological framework based on the actual picture of the physical world, by following the principles of applied sciences, and in particular physics and materials sciences. CHAMEO is conceived as a domain ontology for materials characterisation methodologies, based on EMMO’s top and middle level portions of the ontology.
This paper is organised as follows. In Section 2 an overview of relevant related work is provided. Section 3 illustrates what evidence is used for the definition of the ontology’s scope, which is then described in Section 4 together with the corresponding design criteria. In Section 5 the structure of the CHAMEO ontology is explained in terms of classes and properties and how they relate to the top-level EMMO ontology. Section 6 describes the alignments with other ontologies, while Section 7 highlights CHAMEO’s compliance with the FAIR principles. Finally, in Section 8 conclusions are drawn.
Related work
In this section pertinent background has been reviewed, including existing initiatives in the field of experiment and process standardisation used in analytical laboratories, as well as terminology, metadata and documentation of materials characterisation (CHADA) and related ontologies, in particular the Elementary Multiperspective Material Ontology (EMMO) which is used as the top- and middle-level framework for the ontology development in NanoMECommons.
Existing initiatives for standardising scientific data
The goal of introducing data standards is to effectively manage large quantities of scientific data produced by organisations, being able to share and combine them, in order to derive the greatest value from them. Over the years, efforts both at the research and the industrial level, including European and national research projects (for instance Nostro et al., 2013; Arosio et al., 2013; Capuano and Toti, 2019), have been pursuing standardisation of data representation in organisations for scientific, business and social purposes alike, including the usage, alignment and integration of ontologies.
There are many initiatives promoting and supporting the use of scientific data standards ranging from those advocating more general principles to more domain specific efforts. Some relevant examples are mentioned as follows.
Overarching initiatives include:
The Committee on Data of the International Science Council (CODATA, 2020), promoting global collaboration to advance open science and to improve the availability and usability of data for all areas of research. The Research Data Alliance (RDA, Berman and Crosas, 2020), a community-driven initiative launched by institutions in EU, USA and Australia with the goal of building the social and technical infrastructure to enable open sharing and re-use of data, covering all lifecycle stages (production, usage, exchange, processing, storage). The International Union of Crystallography (IUCr, 1947–2014), a scientific union whose objectives are to promote international cooperation in crystallography and to contribute to all aspects of crystallography, facilitating the standardization of methods, units, nomenclatures and symbols, among others. The Crystallography Information File and Framework (both known by the CIF acronym) are by-products of IUCr and are successful examples of standardizations of data exchange formats and protocols within the scientific area of Crystallography, often cited in the Materials Science community as references to what an effective standardization should be. The European Materials Modelling Council (EMMC, 2014–2022), promoting the digitalisation of materials knowledge and is the governing body of the EMMO ontology. The Materials Research Data Alliance (MaRDA, 2020), a community-led network focused on connecting and integrating U.S. materials research data infrastructure to realize the promise of open, accessible, and interoperable materials data. The FAIR Data Infrastructure for Physics, Chemistry, Materials Science, and Astronomy (FAIR-DI, 2014–2022), supporting the building of a reliable infrastructure for data from basics sciences and engineering. The Pistoia Alliance (PA, 2007), a non-profit group of more than 100 companies that aim at lowering innovation barriers in R&D through pre-competitive collaboration, developing best practices and working with regulators to adopt new standards. The Allotrope Foundation (AF, 2012), an international consortium of research-intensive industries developing a data architecture and a standards-based framework to acquire, exchange, and manage laboratory data in a standardised way. Both promote the use of the FAIR principles in the management of scientific data.
More specifically in Chemicals and Materials Science, relevant associations and initiatives include the following, among which are long-standing efforts in crystallography and recent initiatives in Materials Science.
In the context of the present work, the following initiatives from the life sciences are also very pertinent due to their maturity and as they deal with experimental procedures and analytical laboratories (i.e. a particular type of chemicals and materials characterisation).
The CHADA document template
As described in Romanos et al. (2019), the purpose of CHADA is to provide a standard structure for documenting materials characterisation techniques. CHADA has been developed in the OYSTER project, following the ‘template’ of a similar structured documentation for materials modelling, the MODA. Recently, CHADA has been the subject of a CEN Workshop Agreement. Four types of concepts are used for the classifications of the different steps of an entire characterisation workflow (which can be simply called “characterisation”):
User case, which includes the sample and the information on the environment of testing, the volume of probed material and the information on the surrounding environment, which interacts with the probe and generates a detectable (measurable) signal (information); Experiment, which represents the process by which the metrological chain is defined; within a single experiment, the following fundamental elements are identified: probe, signal, detector, noise (according to the previous definitions); Raw data, which is the set of data that is produced directly as output by the metrological chain, usually expressed as a function of time, position, or photon energy. Data processing, which represents any process (or sequence of processes) by which the data are analysed to arrive at the final shape.
The above concepts are used to structure the CHADA document into sections. Each of the sections groups a set of fields where it is possible to provide textual information about the characterisation methodology. The CHADA document has an introductory section that provides an overview of the overall methodology. The characterisation method can be single or multi-technique. Both cases are documented in the same document template. In case of a multi-technique approach a common overview of the methodology is provided and then, usually, all of the methods are described in each section of the CHADA (User, Experiment, Raw data, Data processing). Such kind of textual document is easily interpretable by humans, but lacks structured data that can help retrieve information on the characterisation methodologies on the base of different dimensions (e.g. material, probe, detector, properties).
In the NanoMECommons project, the CHADA textual document was used as a basis to build a more structured and shared knowledge represented by the CHAMEO ontology and taxonomies. The ontology, together with taxonomies, is meant to drive the user input and queries through which it will be implemented in an Open Innovation Environment (OIE), i.e. a web platform for the establishment of a wider manufacturing/modelling/characterisation network, whose development started under the OYSTER project (OYSTER, 2017–2022). The data collected through the OIE platform will be used to build a shared, harmonised knowledge base of the characterisation methods.
Elementary multiperspective material ontology (EMMO)
Ontology developments in NanoMECommons build on the groundbreaking work on EMMO, an ontology framework for the applied sciences that was initiated by the EMMC-CSA project (EMMC-CSA, 2016–2019) and is being further developed in a number of projects under the EMMC’s governance. In more detail, NanoMECommons also builds on the mechanical testing ontology work performed in the project (OYSTER, 2017–2022) that provides a first example of a characterisation ontology in the EMMO framework. Since then, there have been further developments in EMMO, for example in relation to workflows that are meant to be utilised in NanoMECommons. EMMO has been developed and is applied in a series of European Projects as shown in the Acknowledgements section of the EMMO repository1
EMMO has a minimal top level, which is based on the very few things one can say about the world based on fundamental science, in particular that everything is 4D, that there is a Universe object and a fundamental quantum 4D object and that everything in between cannot be specified a priori, other than to say it is either physical or a void. Everything else is a “Perspective”.
There are no abstract objects in EMMO; everything must be described in terms of physical objects.
EMMO middle level ontologies are representations of different Perspectives, i.e. different ways of representing objects. Hence pluralism is fundamentally built into EMMO. This is very important in bringing together multi-disciplinary views on the world.
All relationships between objects are of three fundamental types: topological (connectedness), mereological (parthood) and semiotic (signs that communicate meaning). In contrast to other ontologies that often have no or only a very loose way of organising relationships, this provides a strong logic framework to support reasoning.
Semiosis, comprising any form of process that involves the use of symbols or signs for the production of meaning, is fundamental to representing what an individual means to communicate and what is known about objects. This is done in accordance with the so-called “semiotic triangle” (Ogden and Richards, 1923), where a symbol/sign is used to symbolise a thought that refers to a certain object: such a symbol or sign is then said that it stands for that object.
The main Perspectives are:
Holistic: considers the importance and role of the whole as well as its parts without specific granularity hierarchy, with subclasses Whole (based on some criterion) and Part (as it appears in relation to the Whole, also regarding its role; hence Role is an alternative label for Part, as is also used, for instance, in theatre).
Persistence: considers the persistence in time (process) or space (object). This perspective also enables to map the widely used 3D ontologies BFO (BFO Discussion Group, 2002) and DOLCE (ISTC-CNR Laboratory for Applied Ontology, 2002) which are based on a similar high-level categorisation.
Physicalistic: uses applied science concepts to provide meaning to objects (e.g. a material as a scientific object, interrogated by scientific means).
Reductionistic: focuses on a strict hierarchy of objects in terms of granularity levels (in space and/or time). Also useful for a “System of systems” view on engineering.
Perceptual: includes recognisable patterns in space and/or time such as sounds, languages, alphabets symbols, mathematics, graphics.
EMMO makes extensive use of annotations and alternative labels to cover the varied meaning attached to words by different communities and different standards (e.g. the definition of Product varies between ISO 9000 and ISO 14040, hence the name Product as such is not sufficient to describe the meaning, even within ISO standards.)
Evidence for the ontology scope development was gathered from the NanoMECommons partners from various perspectives in order to capture a wide range of aspects. These include:
An overview of industrial cases, distinguishing 9 specific cases in the industrial domains tackled by the project (Organic Electronics, Avionics and Automotive, Additive Manufacturing, Energy and Chemicals).
Competency Questions for the NanoMECommons ontology, using an established method for the development of and agreement on the ontology scope.
Collection and review of CHADA from projects partners following the NeOn methodology (Suarez-Figueroa and Gomez-Perez, 2009) and using CHADA as a “tabular technique” which provides the basis for structuring information similar to that described in METHONTOLOGY (Fernandez-Lopez et al., 1997).
Details are provided in the following subsections.
Competency questions
Forty seven competency questions were collected from NanoMECommons’ industrial partners. For each question there is a unique ID, the partner, the characterisation method (if the question is related to a specific method), notes describing how the question is addressed by the ontology, and if the question is in the scope or not. From the competency questions a first set of terms has been extracted. In Table 1 three examples of competency questions are reported, where the extracted concepts are highlighted in bold. The full list of competency questions can be found in the Appendix.
Three examples of competency questions
Three examples of competency questions
What arose is that, except for the questions referring to the detailed data, all of the other questions are in the ontology scope and can in principle be answered by querying the NanoMECommons knowledge base (concepts, relationships, individuals). Detailed operational data, like the sequences of measurements performed by the device, can be stored in external systems and referenced as external resources.
A number of industrial cases from NanoMECommons have been selected for the design of the CHAMEO ontology. For each of them a CHADA document with the description of the characterisation technique has been analysed. In Table 2 there is an example of an industrial case with its title, objectives, the surface preparation method, the workflow methods used for selecting the area of testing or topology and for obtaining the material properties, and the properties of interest that are output of the characterisation.
An example of an industrial case
An example of an industrial case
By analysing how the different CHADA documents were filled, especially for the cases of complex workflows where multiple techniques are used to obtain the final material property, it arose that the way the information is provided by different users is subject to interpretation, and this makes it hard to get homogeneous information about the different characterisation techniques. The CHAMEO ontology is meant to address this issue by providing a framework for defining a clear, machine-readable documentation, based on shared concepts and definitions.
A modular approach is adopted for the design of the ontologies for the characterisation of materials, as depicted in Fig. 1.

Modular ontology design.
The EMMO is the reference framework for the applied sciences, as described in Section 2.3, and includes upper and middle level concepts useful for the development of domain specific ontologies. Based on the EMMO, the CHAMEO ontology provides the constructs that are generic and transversal with respect to the different methods of characterisation. Specific method ontologies are then developed using the CHADA constructs for describing each characterisation method (e.g. Mechanical Testing). For each characterisation method there can be use case ontologies (e.g. Nanoindentation, Fatigue, Cable Bundle). The modular approach allows to maximise reusability and reduces the effort for maintaining the ontologies.
As a semantic model built on the textual CHADA document, the CHAMEO ontology retains the flexibility to have both structured information, also exploiting taxonomies where possible, and human readable textual descriptions.
The definitions listed below, extracted from the CEN/CENELEC Workshop Agreement (CWA 17815, CEN, 2021) were used for the ontology design:
The ISA-88 standard (American National Standards Institute and International Society of Automation and Instrument Society of America, 2010) is considered as a base to model the process hierarchy in the ontology. In the ISA-88 the Process Model describes how a batch process can be decomposed into a hierarchy, namely:

ISA88 process hierarchy.
The ISA88 specifically refers to the concept of Batch Process, but its main principles can be adapted for the CHAMEO ontology. Figure 2 depicts the process hierarchy referred to, where it has been made explicit that a process can have sub-processes. The following mapping between the CWA and ISA-88 definitions clarifies how the process is modelled in the ontology. The Characterisation Workflow is the overall process, composed by Characterisation methods (can be many in the multi-technique approaches); thus the latter are sub-processes of the Characterisation Workflow. Each Characterisation method is typically made up of multiple stages (e.g. calibration, measurement, post-processing). Stages are currently the level of the hierarchy where the CHADA ontology stops. Further decompositions into operations and activities can be done in sub-ontologies of the CHAMEO ontology describing the details of specific methods (e.g. Mechanichal Testing, Focus Ion Beam, RAMAN).
This section provides a description of the CHAMEO ontology classes and properties and how they are mapped to the EMMO ontology. The alignment with other external ontologies will be discussed in Section 6.
In the following description, class names are in bold, whereas object properties are in bold and italic, and datatype properties are in italic. In the ontology diagrams, classes are depicted as rectangles (yellow for the CHADA ontology classes, light green for the EMMO classes, white for other external ontology classes); individuals have been depicted as blue rectangles in order to visually distinguish them from the classes; and relationships as arrows with dotted lines when referring to object/datatype properties (in blue and gray, respectively) and arrows with solid lines when referring to subclass properties/rdf:type properties (black and purple, respectively). Datatype property values are also displayed within white rectangles where appropriate. Firstly, an overview on the characterisation workflow and method is provided (see Fig. 3); subsequently, details are described on how the stages, materials and devices involved in the characterisation method are modelled.

Characterisation workflow and its components.
In Fig. 4 the class hierarchy of specimen, sample and material is depicted, together with the processes that are related to manufacturing, sampling and specimen preparation. The following definitions are adopted.

Specimen, sample, material.
The portion of ontology in Fig. 5 illustrates how the characterisation system is modeled, as described below.

Characterisation system and interaction with the specimen.
The calibration process is illustrated in Fig. 6, whose classes and properties are described as follows.

Calibration process.

Measurement and data processing to get the characterisation property.
The last portion of the ontology is the one related to the actual measurement of the material’s characterisation property, as depicted in Fig. 7 and explained as follows.
Following the best practices in ontology development, knowledge from existing ontologies has been reused when possible for developing the CHAMEO ontology. Besides, the CHAMEO ontology models generic aspects of the characterisation methodology and therefore requires connections with other ontologies/taxonomies for specific use-cases. Alignments and connections between CHAMEO and other ontologies are detailed in the following subsections. Further ontologies and taxonomies are expected to be linked to CHAMEO in the future.
OIE ontologies
A set of EMMO-compliant domain ontologies have been developed to be integrated into the Open Innovation Environment (OIE), a web-based platform that enables sharing and exchanging of semantic, ontology-based, information across members of the European Materials Science community. These ontologies are called OIE ontologies (GitHub repository available here: Manufacturing ( Material ( Model ( Software (
Friend-of-a-friend (FOAF)
The connection with the FOAF ontology (Brickley and Miller, 2014) is made by defining the CHAMEO
Dublin core
The Dublin Core ontology (Dublin Core Metadata Initiative (DCMI), 2020) is used to annotate the ontology with the information about its license, in compliance with the FAIR principles (see Section 7). Just like the FOAF ontology, Dublin Core is not compliant with OWL-DL, therefore it is not imported in CHAMEO; instead, a subset of its constructs is referenced.
DataCite ontology
The DataCite Ontology (Shotton and Peroni, 2020) is used to add scientific references for the validation of the specific characterisation methods or the overall characterisation workflow. More precisely, the class
Compliance with the FAIR principles
The FAIR data principles (Findable, Accessible, Interoperable, and Reusable) (Wilkinson et al., 2016) are guidelines to support the reusability of digital assets with an emphasis on the machine-readability of data. Ontologies, besides their key role for supporting interoperability, are digital artefacts and as such should follow the FAIR principles, in order to ensure findability, accessibility, reusability and interoperability. The CHAMEO was developed as a FAIR ontology, as detailed below:
Findable: The URI of the ontology is resolvable (
Accessible: CHAMEO’s metadata are retrievable via a standardized, open communication protocol (HTTP) by using the ontology’s URI or permanent URL, and as stated in the Abstract is also stored and publicly accessible in a GitHub repository available at:
Interoperable: CHAMEO has been implemented using standard RDF (W3C, 2014a), RDFS (W3C, 2014b) and OWL (W3C, 2012) formalisms, and uses other vocabularies which in turn follow the FAIR principles (like Dublin Core Metadata Initiative Terms (Dublin Core Metadata Initiative (DCMI), 2020), VANN (Davis, 2005), etc.). Furthermore, a number of alignments with other ontologies was also carried out, as detailed in Section 6.
Reusable: CHAMEO’s documentation is available in HTML format in the GitHub repository, includes all of the recommended metadata (namespace prefix, version info, contributor, creation date, etc.), a number of optional metadata and basic provenance metadata as well. All of the ontological classes have labels (defined via the
CHAMEO’s compliance with the FAIR principles has also been tested via the experimental FOOPS! tool (Garijo et al., 2021), obtaining a score of 85%. However, it is important to underline that, at the time of this writing, the tool still displays some bugs and inconsistencies when analyzing the ontologies (including the inconsistent detection of the ontologies’ persistent URIs and/or URL redirections). As a result, CHAMEO’s actual score should be even higher than the one currently returned by the tool.
The CHAMEO ontology presented in this work has been developed as a part of a broader initiative towards the harmonisation of different characterisation techniques, aligned with the objectives of the European Characterisation and Modelling Councils, EMCC and EMMC, respectively. The goal is to model generic aspects of the characterisation methodologies, in order to provide a common framework for the development of ontologies related to specific techniques. Taxonomies and catalogues are planned to be further developed to provide specific concepts to be used in order to specialise the CHAMEO classes and properties. CHAMEO is based on EMMO, a top-level ontology conceived to be a reference for modelling knowledge in the area of Materials Science, and is aligned with a number of other domain ontologies. The CHAMEO ontology has been developed within the OYSTER and NanoMECommons projects, and is meant to be exploited in an Open Innovation Environment, a platform for collecting data about characterisation experiments and for sharing knowledge across communities.
Footnotes
Acknowledgements
This work received funding from the European Commission via the Horizon 2020 projects “NanoMECommons” (Grant Agreement n. 952869) and “OYSTER” (Grant Agreement n. 760827).
Full list of competency questions
Full list of the forty-seven competency questions
ID
Question
Method
Notes
In scope
CQ1
Which kind of material has been tested (metal, ceramic, polymer, …)?
Nanoindentation
Material class and instances
Yes
CQ2
Which reference sample has been used for system calibration (fused quartz, sapphire, etc.)?
Nanoindentation
Types of Sample
Yes
CQ3
Which indenter tip has been used (Vickers, Berkovich, etc.)?
Nanoindentation
Types of Probe
Yes
CQ4
How was the sample mounted on the sample holder?
Nanoindentation
Requires a taxonomy of sublcasses under SampleHolder, Sample preparation
Yes
CQ5
How was the sample prepared for testing (mechanical polishing, electropolishing, …)?
Nanoindentation
Sample preparation
Yes
CQ6
Which is the surface roughness of the sample?
Nanoindentation
Roughness is a Sample property, the actual data is stored outside the ontology
No
CQ7
Which were testing humidity and temperature?
Nanoindentation
Humidity and Temperature are part of the Characterisation environment.
Yes
CQ8
How many measurements were completed?
Nanoindentation
Actual measurement data is stored outside the ontology
No
CQ9
At which locations? (for mapping)
Nanoindentation
Actual measurement data is stored outside the ontology
No
CQ10
Which loading history has the sample undergone (quasi-static, continuous stiffness measurement, high-speed, …)?
Nanoindentation
List of measurement types for a certain sample
Yes
CQ11
Which method has been used for data analysis (Oliver-Pharr, etc.)?
Nanoindentation
Subclass of Post processing
Yes
CQ12
Have other properties been investigated, apart from Hardness and Modulus?
Nanoindentation
Subclass of properties
Yes
CQ13
Were the tip area function and machine compliance calibrated immediately after testing? If not, when was the last calibration performed?
Nanoindentation
Calibration datatype property executionDate
Yes
CQ14
Have images (micrographs) of the indentation marks been acquired?
Nanoindentation
Images linked to the Measurement?
Yes
CQ15
Who is the person (user) who did the experiment?
Nanoindentation
For GDPR information about the laboratory will be provided, not the specific user.
No
CQ16
What type is the material? (thin film, multilayered, bulk – single phase, bulk – complex, MEMS, nanopatterned)
Nanoindentation
Subclass of Material
Yes
CQ17
What is the method used for the validation of nanoindentation? (correlate individual indents with microstructure: X-ray mapping, AFM, EDS, EBDS)
Nanoindentation
Subclass of CharacterisationMethod
Yes
CQ18
What is the speed of measurement? (is it high-speed? – i.e. fast protocol? 1h, high-resolution nanoindentation protocol 1 day).
Nanoindentation
Subclass of the Measurement + Measurement Properties
Yes
CQ19
What is the speed per indent? (i.e. 1 indent/second, 1 indent/minute, …)
Nanoindentation
Actual measurement data is stored outside the ontology
No
CQ20
What is the instrument type?
Nanoindentation
Subclasses of CharacterizatonMachine
Yes
CQ21
What is the (total) thickness of the thin-film (multi-)layer?
Nanoindentation
Sample parts, like the Layer, and their properties can be described in the ontology
Yes
CQ22
How many layers compose the multilayered film? (1, 2, 3, …)
Nanoindentation
Sample parts, like the Layer, and their properties can be described in the ontology
Yes
CQ23
How many layers is the sample made up of?
FIB-DIC (Focused Ion Beam-Digital Image Correlation)
Sample parts, like the Layer, and their properties can be described in the ontology
Yes
CQ24
What is the thickness of each layer?
FIB-DIC
Sample parts, like the Layer, and their properties can be described in the ontology
Yes
CQ25
Which materials are the layers composed of?
FIB-DIC
Layer is a Material. Different materials are subclasses of Material.
Yes
CQ26
Has the surface been etched to reveal microstructure?
Nanoidentation of multiphases steel
Defined in the specific cases
Yes
CQ27
Which etchant has been used?
Nanoidentation of multiphases steel
Subclass of Probe
Yes
CQ28
Which reference sample has been used for system calibration (fused quartz, sapphire, Polymeric Material, etc.)?
Nanoindentation
Subclass of Material, Sample
Yes
CQ29
Was the sample embedded in a matrix for sample preparation (e.g. resin)?
Nanoindentation
Sample preparation
Yes
CQ30
Type of resin?
Nanoindentation
Sample holder type/material
Yes
CQ31
What is the thickness of the sample?
Nanoindentation
Sample dimension
Yes
CQ32
Was the sample previously submitted to a conditioning (temperature, humidity, Duration)?
Nanoindentation
Sample preparation properties
Yes
CQ33
What are the testing parameters: Maximum load, targeted depth, strain rate, drift rate, maximal holding time?
Nanoindentation
Measurement parameters
Yes
CQ34
Which kind of material has been tested (Reflective solid samples, bulk and thin films)?
Spectroscopic Ellipsometry
Subclass of Material
Yes
CQ35
Which reference sample has been used for Monochromator Calibration and optical alignment (Al sample)?
Spectroscopic Ellipsometry
Subclass of Sample
Yes
CQ36
Which reference sample has been used for evaluation of calibration state (bulk c-Si reference sample)?
Spectroscopic Ellipsometry
Subclass of Sample
Yes
CQ37
How was the sample mounted on the ellipsometer stage (Positioning and alignment of the sample adjusting height, tilt, etc.)?
Spectroscopic Ellipsometry
Not such level of detail in the ontology as structured information. May be a textual description of the Sample preparation.
No
CQ38
What was the characterisation environment (ambient, inert atmosphere)?
Spectroscopic Ellipsometry
Characterisation environment class and instances
Yes
CQ39
Which was the selected measurement method (Spectroscopic Mono/MWL, Kinetic Mono/MWL)?
Spectroscopic Ellipsometry
Subclass of Measurement
Yes
CQ40
Which were the input parameters for the measurement (AOI, M-A Angle, Spectral range, Spectrum acquisition step, Light integration duration, Accumulation…)?
Spectroscopic Ellipsometry
Measurement parameters
Yes
CQ41
How many measurements were completed (Static measurements, real time)?
Spectroscopic Ellipsometry
Count of the different Measurements in the Experiment
Yes
CQ42
At which locations? (mapping…)
Spectroscopic Ellipsometry
Actual measurement data is stored outside the ontology
No
CQ43
Which were the data analysis procedures used for the post-processing of the raw data (Spectroscopic or kinetic theoretical optical model)?
Spectroscopic Ellipsometry
Subclass of Post processing
Yes
CQ44
Which were the investigated properties? (Thickness, optical properties of materials, information on the optical functions, surface roughness, interface layers…)
Spectroscopic Ellipsometry
Properties that are output of the Method
Yes
CQ45
Which software used for post-processing (DeltaPsi2, Excel, Origin, etc.)?
Spectroscopic Ellipsometry
Software product used for the Post processing
Yes
CQ46
Was the system calibrated immediately after the measurement(s) end? If not, when was the last calibration performed?
Spectroscopic Ellipsometry
Calibration datatype property executionDate
Yes
CQ47
Who is the person (user) who did the experiment?
Spectroscopic Ellipsometry
For GDPR, information about the laboratory will be provided, not the specific user.
No
