Abstract
In the vibration system consisting of the micro plate, electric field and fluid film, the electrostatic force and the fluid film pressure play important role. To consider the effects of the electrostatic force and fluid film pressure on the micro plate vibration, an electromechanical-fluidic coupled dynamics model should be developed. It is a multi-field coupled dynamics problem. Here, the nonlinear electromechanical-fluidic coupled dynamic equations of the micro plate subjected to the electrostatic force and the fluid film pressure are derived. Using KBM method, the nonlinear multi-field coupled dynamic equations are resolved. Meanwhile, the equations of the electric field and the fluid pressure fluctuations are presented. Using these equations, the nonlinear multi-field coupled free vibration and the forced responses of the micro-plate are analyzed. Results show that the electrostatic force and the fluid film pressure have obvious effects on the dynamic displacements of the micro-plate, and the dynamic displacements of the micro-plate can cause fluctuations of the electrostatic force and the fluid film pressure. These results are useful in the design and manufacture of such MEMS.