An inertial piezoelectric hybrid actuator with large angular velocity and high resolution

Abstract

This article proposes an inertial piezoelectric actuator with hybrid design of asymmetrically clamping structures and a bias unit for the achievement of large angular velocity and high resolution. To investigate the influence of asymmetrical clamp and bias unit on the driving performance, two types of actuators were fabricated and tested. Combined effects from asymmetrical clamp and bias unit contribute to type A, while their subtractive effect is applied to type B. Using a scanning laser vibrometer, experiments were conducted to analyze the characteristics of the angular displacement and corresponding velocity. It is indicated that the measured first-order natural frequencies for above two types are 13.828 and 14.141 Hz, which agrees well with the simulation results of 16.666 and 17.379 Hz, respectively. Besides, compared with the actuators with simple asymmetrical clamping structure or bias unit, this hybrid actuator can obtain an angular velocity 6.87 rad/s at 80 V and 16 Hz and a resolution of 2.80 μrad under a square signal of 20 V and 1 Hz and an offset distance of −22 mm. As a result, the proposed actuators can achieve large angular velocity and high resolution, which is potentially applicable to quick positioning with high accuracy.

Keywords

actuator angular velocity hybrid piezoelectric resolution

Get full access to this article

View all access options for this article.

References

Čeponis

Mažeika

(2017) An inertial piezoelectric plate type rotary motor. Sensors and Actuators A: Physical 263: 131–139.

Chen

Liu

(2013) Modeling and experimental validation of new two degree-of-freedom piezoelectric actuators. Mechatronics 23: 1163–1170.

Cheng

Wen

et al. (2015) Piezoelectric inertial rotary actuators based on asymmetrically clamping structures. Sensors and Actuators A: Physical 223: 125–133.

Cheng

Zhang

et al. (2014) Effect of different clamping lengths of cantilever bimorph on its dynamic characteristics. Optics and Precision Engineering 22(5): 1296–1303.

Deng

Liu

Chen

et al. (2018) Development and experiment evaluation of an inertial piezoelectric actuator using bending-bending hybrid modes. Sensors and Actuators A: Physical 275: 11–18.

Zhang

Pan

et al. (2013) Piezoelectric motor based on synchronized switching control. Sensors and Actuators A: Physical 197: 53–61.

Higuchi

Yamagata

Furutani

et al. (1990) Precise positioning mechanism utilizing rapid deformations of piezoelectric elements. In: Proceedings on micro electro mechanical systems, an investigation of micro structures, sensors, actuators, machines and robots, Napa Valley, CA, 11–14 February 1990, pp. 222–226. New York: IEEE.

Jiang

Lam

(2000) Optimization of a piezoelectric ceramic actuator. Sensors and Actuators A: Physical 84: 81–94.

Zhao

et al. (2013) A piezoelectric-driven rotary actuator by means of inchworm motion. Sensors and Actuators A: Physical 194: 269–276.

10.

Zhou

Zhao

et al. (2015) Design and experimental performances of a piezoelectric linear actuator by means of lateral motion. Smart Materials and Structures 24: 065007.

11.

Yang

Zhang

et al. (2008) Thermal effect on piezoelectric stick-slip actuator systems. Review of Scientific Instruments 79: 046108.

12.

Yang

Liu

(2009) Research on a piezoelectric actuator based on the match of impact and friction. In: Proceedings of the ISECS international colloquium on computing, communication, control, and management, Sanya, China, 8–9 August 2009, pp. 435–438. New York: IEEE.

13.

Liu

Zhao

et al. (2018) Design and experiments of a single-foot linear piezoelectric actuator operated in stepping mode. IEEE Transactions on Industrial Electronics 65(10): 8063–8070.

14.

Peng

et al. (2015) A review of long range piezoelectric motors using frequency leveraged method. Sensors and Actuators A: Physical 235: 240–255.

15.

Rho

Lee

Chung

et al. (2008) Analysis of a nanopositioning actuator using numerical and analytic methods. Smart Materials and Structures 17: 025025.

16.

Simu

Johansson

(2002) Fabrication of monolithic piezoelectric drive units for a miniature robot. Journal of Micromechanics and Microengineering 12: 582–589.

17.

Song

Shao

et al. (2018) Piezoelectric inchworm rotary actuator with high driving torque and self-locking ability. Sensors and Actuators A: Physical 282: 174–182.

18.

Sun

Chen

Zhang

et al. (2015) A novel piezo-driven linear-rotary inchworm actuator. Sensors and Actuators A: Physical 224: 78–86.

19.

Uchino

(2008) Piezoelectric actuators 2006—expansion from IT/robotics to ecological/energy applications. Journal of Electroceramics 20: 301–311.

20.

Wen

Zeng

et al. (2013) A new inertial piezoelectric rotary actuator based on changing the normal pressure. Microsystem Technologies 19: 277–283.

21.

Liu

Shi

et al. (2018) Development of a nonresonant piezoelectric motor with nanometer resolution driving ability. IEEE/ASME Transactions on Mechatronics 23(1): 444–451.

22.

Zeng

Sun

et al. (2014) Design and testing of a novel piezoelectric micro-motor actuated by asymmetrical inertial impact driving principle. Review of Scientific Instruments 85: 035002.

23.

Zhang

Liu

Deng

et al. (2018) Development of a novel two-DOF pointing mechanism using a bending-bending hybrid piezoelectric actuator. IEEE Transactions on Industrial Electronics 99: 1–1.

24.

Zhang

Hesselbach

et al. (2006) Development of a two-degree-of-freedom piezoelectric rotary-linear actuator with high driving force and unlimited linear movement. Review of Scientific Instruments 77: 035112.

25.

Zhao

Alujević

Depraetere

et al. (2015) Adaptive-passive control of structure-borne noise of rotating machinery using a pair of shunted inertial actuators. Journal of Intelligent Material Systems and Structures 27: 1584–1599.