Abstract
Magnetically levitated planar actuators can simplify the planar motion mechanism and thus realize high-speed and high-accuracy motion. The accuracy in the shape of coil, a core part of magnetically levitated planar actuator, is crucial to the performance of actuator. Although the foil-wound coil has high forming precision, the strong eddy current generated in the motion of actuator may pose great interference to magnetic levitation and deteriorate system stability. Based on a thorough analysis of the eddy current and eddy-current force of foil-wound coils in the magnetically levitated planar motion, the paper proposes the calculation model for disturbing eddy force. Results from the simulation show that the model has a relatively high accuracy. It is also indicated that further predictive compensation for the eddy force in the control of precise magnetically levitated actuators can increase the kinematic accuracy and stability of magnetically levitated planar motion system.